Used TEL / TOKYO ELECTRON ACT 12 #9112795 for sale
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ID: 9112795
Wafer Size: 8"
CRA Cassette Block Robotics Arms, 8"
Main Component Part Numbers:
CRA X Assembly Part No: CT2987-455715-W1
CRA 8" Fork Conversion Assembly Part No: CT2985-444227-W2
CRA Mapping LED Sensor Part No: CT2985-443032-W1
CRA Y Assembly Part No: CT2987-455713-W1
CRA Z Assembly Part No: CT2987-455716-W1
CRA Theta Assembly Part No: CT2987-455756-W1
CRA Electric Assembly Part No: CT2987-456574-W1
2987-455715-W1 ARM (ACT12 CRA-X-IPL)
CT2980-193234-11 BLOCK,SLIDE NP8099D005-2
CT2980-193235-11 BASE,FORK NP8099D002-2
CT2980-193236-11 HOLDER NP8099D006-1
CT2980-193237-11 STAND (1) NP8099D003-1
CT2980-193238-11 STAND (2) NP8099D004-1
CT2980-193239-11 COLLER,PULLEY NP8099D009-0
CT2980-193240-11 NUT NP8099D010-0
CT2980-193241-11 BLOCK,TENSION NP8099D012-1
CT2980-193242-11 BRACKET NP8099D013-1
CT2980-193243-11 COLLER,IDLER NP8099D015-0
CT2980-193244-11 BLOCK,MAPPING NP8099D016-1
CT2980-193245-11 STOPPER,END NP8099D017-0
CT2980-193246-11 STOPPER NP8099D018-0
CT2980-193247-11 BLOCK,IDLER NP8099D019-1
CT2980-193248-11 SHAFT NP8099D020-0
CT2980-193249-11 COVER,OUTER E NP8099D022-1
CT2980-193250-11 COVER,OUTER H NP8099D023-1
CT2980-193251-11 BRACKET NP8099D024-2
CT2980-193252-11 BRACKET AMP NP8099D025-2
CT2980-193253-11 BRACKET,SPCON NP8099D026-2
CT2980-193254-11 BRACKET,CYL NP8099D027-2
CT2980-193255-11 BRACKET,AMP NP8099D028-2
CT2980-193256-11 FLAG,MAPPING NP8099D29-1
CT2980-193257-11 BRACKET (HOME) NP8099D030-2
CT2980-193258-11 FLAG,X-AXIS NP8099D031-1
CT2980-193259-11 BRACKET (1) NP8099D032-2
CT2980-193260-11 BRACKET (2) NP8099D033-2
CT2980-193261-11 COVER,OUTER L NP8099D034-1
CT2980-193262-11 COVER,INNER B NP8099D035-2
CT2980-193263-11 COVER,INNER NP8099D036-2
CT2980-193264-11 GUIDE X-040-0
CT2980-193265-11 BELT X-042-0
CT024-016768-1 AIR CYLINDER CJ2B10-150A
CT028-002835-1 FITTING,TUBE KJL04-M5
CT024-011352-1 SPEED CONTROLLER AS1001F-04
CT024-013951-1 SPEED CONTROLLER TMH-04J HOLDER
CT028-002956-1 FITTING,TUBE M-5J
CT018-002437-1 LM GUIDE RSR9ZMC1+195LM
CT044-000098-1 SUPPORT,PCB SQ-5
CT2890-193266-11 BASE,X-AXIS NP8099D301-0
CT2980-193267-11 PULLEY ASSY NP8099D302-0
CT2980-193268-11 IDLER,TENSION NP8099D030-0
CT2980-193269-11 PIN NP8099D021-1
2985-444227-W2 CONVERSION (8") ASSY, FORK
CT2910-290041-12 8" TWEEZERS
CT310-392002-8 P HOLDER*
CT2910-415415-11 GUIDE,RIGHT
CT2910-415416-11 GUIDE,LEFT
CT2910-325388-12 BASE
CT1910-425613-12 BLOCK(SE)
CT1910-425614-12 BLOCK(RE)
CT2910-321121-11 STAND,RIGHT GUIDE
CT2910-321122-11 STAND,LEFT GUIDE
2985-443032-W1 SENSOR (8"C), MAPPING LED
CT2980-091699-11 SENSOR,MAPPING LED NP8074D200-0
2987-455713-W1 ARM (ACT12 CRA-Y-SHORT-IPL)
CT2980-193270-11 PLATE (1),SIDE NP8099E001-2
CT2980-193271-11 PLATE (2),SIDE NP8099E002-1
CT2980-193272-11 PLATE (END),S NP8099E004-2
CT2980-193273-11 PLATE (HOME),S NP8099E005-2
CT2980-193274-11 PLATE (END),B NP8099E013-1
CT2980-193275-11 PLATE (HOME),B NP8099E014-1
CT2980-193276-11 SUPPORT,CLAMP NP8099E009-1
CT2980-193277-11 BRACKET NP8099E010-0
CT2980-193278-11 BRACKET NP8099E011-0
CT2980-193279-11 CLAMP,BELT NP8099E015-0
CT2980-193280-11 STOPPER NP8099E020-1
CT2980-193281-11 STOPPER,HOME NP8099E021-1
CT2980-193282-11 BLOCK (1),MOTO NP8099E022-1
CT2980-193283-11 BLOCK (2),MOTO NP8099E023-1
CT2980-193284-11 PLATE,SPACE NP8099E012-1
CT2980-193285-11 PLATE,MOUNT NP8099E025-2
CT2980-193286-11 COVER (1),GUID NP8099E026-3
CT2980-193287-11 COVER (2),GUID NP8099E027-3
CT2980-193288-11 BRACKET,MOTOR NP8099E028-2
CT2980-193289-11 BRACKET NP8099E029-1
CT2980-193290-11 FLAG NP8099E030-0
CT2980-193291-11 BRACKET NP8099E031-2
CT2980-193292-11 COVER (2),BELT NP8099E033-1
CT2980-193293-11 COVER,MOTOR NP8099E032-2
CT2980-193294-11 COVER (1),BELT NP8099E034-1
CT2980-193295-11 SUPPORT,SIDE NP8099E035-2
CT2980-193296-11 SUPPORT,CENTE NP8099E036-1
CT2980-193297-11 GUIDE (1) NP8099E037-1
CT2980-193298-11 GUIDE (2) NP8099E038-1
CT2980-193299-11 COVER (1) NP8099E039-1
CT2980-193300-11 COVER (2) NP8099E040-1
CT2980-193301-11 COVER,SIDE NP8099E041-1
CT2980-193302-11 SUPPORT (1),CO NP8099E042-1
CT2980-193303-11 SUPPORT (2),CO NP8099E043-1
CT2980-193304-11 GUIDE Y-055-0
CT023-002464-1 BELT,TIMING 345-3GT-12
CT2980-193305-11 BELT Y-060-1 (2995100137114
CT047-003149-1 FLEXIBLE DUCT 25.2-055-NP-21-22B
CT2980-193306-11 SHEET NP8099E045-1 (299510013714
CT2980-193307-11 BASE,GUIDE NP8099E301-0
CT2980-193308-11 PULLEY (HOME) NP8099E302-0
CT2980-193309-11 PULLEY (END) NP8099E303-0
CT2980-193310-11 BRACKET NP8099E044-2
2987-455716-W1 ARM (ACT12 CRA-Z-IPL)
CT2980-193311-11 SUPPORT (1),SI NP8099F002-2
CT2980-193312-11 SUPPORT (2),SI NP8099F003-2
CT2980-193313-11 BASE (1),GUIDE NP8099F004-2
CT2980-193314-11 BASE (2),GUIDE NP8099F005-2
CT2980-193315-11 COVER (1) NP8099F006-1
CT2980-193316-11 COVER (2) NP8099F007-1
CT2980-193317-11 SUPPORT,COVER NP8099F008-1
CT2980-193318-11 COVER (3) NP8099F009-1
CT2980-193319-11 BRACKET NP8099F010-1
CT2980-193320-11 SHUTTER NP8099F011-0
CT2980-193321-11 SUPPORT (1),CA NP8099F012-2
CT2980-193322-11 SUPPORT (2),CA NP8099F013-1
CT2980-193323-11 SUPPORT (3),CA NP8099F014-1
CT2980-193324-11 MOUNT (1),CABL NP8099F315-0
CT2980-193325-11 MOUNT (3),CABL NP8099F316-0
CT2980-193326-11 CATERPILLAR Z-230
CT023-002463-1 BELT,TIMING 288-2GT-15
CT2980-193327-11 BASE,Z-AXIS NP8099F301-0
CT2980-193330-11 COVER,BELT N\P8099F020-0
CT2980-193328-11 MOUNT (4),CABL NP8099F304-0
CT2980-193329-11 BALL SCREW UNIT Z-32-0
2987-455756-W1 ARM (ACT12CRA-THETA-IPL)
CT2980-193331-11 BASE,MOTOR NP8099G001-2
CT2980-193332-11 SUPPORT NP8099G003-1
CT2980-193333-11 SUPPORT (2) NP8099G004-1
CT2980-193334-11 STOPPER NP8099G006-1
CT2980-193335-11 STOPPER NP8099G007-0
CT2980-193336-11 PIN NP8099G008-0
CT2980-193337-11 COVER NP8099G009-2
CT2980-193338-11 MOUNT (1),CABL NP8099G303-0
CT2980-193339-11 BRACKET NP8099G011-1
CT2980-193340-11 BRACKET NP8099G012-1
CT2980-193341-11 BRACKET NP8099G013-1
CT2980-193342-11 SHUTTER NP8099G014-2
CT2980-193343-11 BRACKET NP8099G015-1
CT2980-193344-11 BRACKET NP8099G016-2
CT2980-193497-11 SUPPORT (3) NP8099G017-0
CT044-002136-1 SUPPORT, PCB WLS-03-0
CT2980-193345-11 BASE,THETA-AX NP8099G301-0
CT2980-193346-11 SPACER,MOTOR NP8099G302-0.
TEL / TOKYO ELECTRON ACT 12 is a photoresist equipment suitable for a variety of processes in the semiconductor industry. The system is highly reliable and incorporates a number of innovative features that improve upon existing systems. The photoresist systems is ideal for photoresist applications such as lithography and etching processes. The unit uses a state-of-the-art imaging machine with a choice of lens selection, beam blanking, a-Si/Gas plasma, and Optic Cross Scan with an optimized tool for automatic process control. The asset has an integrated beam blanking option, which allows for the application of photoresist to a single object on the wafer at a time. This prevents the potential cross-contamination of different Mask Aligner, as no photoresist is applied to the entire wafer in one step. The model also employs a-Si/Gas-plasma processes, which enable a higher level of performance in lithography systems. This feature offers more precise control of laser beam diameter, exposure time, and reticle size, which allows for better stability and precise patterning. Additionally, the equipment is equipped with a High-Density Definition Measurement technology, providing superior accuracy and repeatability in metrology measurements. This technology contributes to higher levels of precision throughout the process, such as depth control and focus monitoring. Finally, the system also has an Optical Cross Scan technology, designed for use with a variety of saws such as step and repeat lithography. The unit offers improved throughput and higher production yields due to its real-time image transfer and higher speed of control. TEL ACT 12 photoresist machine enables semiconductor manufacturers to optimize their processes in order to produce high-quality products that meet market needs, taking reliability into account. Its high-performance imaging tool, beam blanking, a-Si/Gas plasma, and Optical Cross Scan, along with the High-Density Definition Measurement technology, promise greater flexibility and accuracy for your processes.
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