Used TEL / TOKYO ELECTRON ACT 12 #9114986 for sale

ID: 9114986
ADH Panel assembly Part no. ZF82-003384-11.
TEL / TOKYO ELECTRON ACT 12 is a photoresist equipment produced by TEL (TOKYO ELECTRON Ltd). It is designed for micro-electronic device (MEMs) fabrication processes, enabling the production of high-resolution patterning needed for device manufacture. The system is based on the ACT platform, which offers unprecedented performance in patterning a wide range of photoresist materials, and produces excellent lithography results with fast turn-around times. The unit comes with an array of features designed to streamline device manufacture. Its two-step lithography process, which consists of pre-exposure baking and post-exposure baking, allows for high throughput. It also has an imaging speed of up to twice that of conventional dry-etch systems, and supports a wide variety of photoresist chemistries and mask materials. TEL ACT 12 is highly accurate, with sub-micron precision, to enable the most detailed pattern exposures. It also has a bi-directional imaging capability, combined with the tandem feature that allows both positive and negative photoresist layers to be transferred in a single process. The machine is flexible enough to cater to a variety of industries, from microchip fabrication and MEMs device manufacture, to biotechnology and medical device manufacture. The tool performs best on a range of substrates, including silicon, gallium arsenide, polycrystalline, organic, and metal oxide, making it a versatile solution for application in multiple industries. The asset comes with an intuitive user interface, making it easy to navigate and operate. It has a powerful recipe database, where users can access different processes and parameters for different photoresist materials and substrates. The model is designed with a high degree of safety in mind, with a reliable fume collection equipment and several safety features to ensure the safe and accurate operation of the system. It is also easy to maintain, with minimal down time due to service or maintenance. In conclusion, TOKYO ELECTRON ACT12 is a photoresist unit designed for micro-electronic device fabrication that offers unprecedented performance and accuracy. It is highly accurate and flexible, with an intuitive user interface, adjustable processing speeds, and a range of safety features to ensure its safe operation. Furthermore, the machine is easy to maintain, with minimal downtime due to service or maintenance.
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