Used TEL / TOKYO ELECTRON ACT 12 #9241966 for sale
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TEL / TOKYO ELECTRON ACT 12 is a photoresist equipment used in a variety of industrial and scientific applications. Photoresist systems involve the use of light to create images on surfaces such as silicon wafers, metal plates, and glass. TEL ACT 12 system utilizes a combination of pulsed and continuous illumination methods to produce high fidelity images. The unit features a highly accurate, 120nm resolution with 0.9degree angular accuracy, as well as a bright light source with a minimum of around 900 mW/cm2. The image projection machine of TOKYO ELECTRON ACT12 includes a multi-focus adjustable lens, an X-Y stage, and two imaging arms. The imaging arms are capable of providing different types of lightning illumination, including pulsed lightning (PL), continuous lightning (CL), and constant voltage (CV). The PL method uses a predetermined pulse-width to expose the photoresist to the desired light intensity. The CV method allows the user to control voltage of the projected light with a variable duty cycle, allowing for precise control of the light intensity and resolution. The stage of TEL / TOKYO ELECTRON ACT12 includes dual-axis motorized actuators, allowing for precise placement of the wafer or substrate in order to create accurate images. The stage also features a SmartRoute™ tool, which allows for easy and efficient wafer transportation and positioning. The asset also includes a vision model that aids in image control (alignment and focus) and allows for adjustments based on real-time image feedback. Overall, ACT12 is a photoresist equipment that allows for high-precision image formation on the substrate. The automation and advanced imaging systems make it an ideal choice for industries such as semiconductor production. The adjustable lens system, dual-axis motorized actuators, and the SmartRoute™ unit are all advantageous features that make this machine extremely useful in controlling and forming accurate images.
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