Used TEL / TOKYO ELECTRON ACT 12 #9244894 for sale

TEL / TOKYO ELECTRON ACT 12 is a photoresist processing equipment designed for a wide range of applications. It allows users to develop a wide variety of fine structure patterns with high accuracy and repeatability. The system is equipped with an advanced and sophisticated semiconductor process controller, which supports various customized processes. The unit is capable of producing high-definition patterns with resolutions up to 200nm. The photoresist process involves the application of a layer of light-sensitive material onto the substrate. Once the photoresist has been applied, it is then exposed to the appropriate type of light, such as deep ultraviolet light. The exposure activates the photoresist in certain areas, and the material becomes hardened in those areas, making it immune to the subsequent chemical process. TEL ACT 12 machine comes with a set of proprietary software that provides operators with a powerful range or tools and functions for setting up the required process. It includes a Soft Detail Generator (SDG) program, which allows users to quickly and accurately simulate and adjust patterns before processing them into a substrate. It also features a separate gas control station that allows for precise adjustment of the gas flow for each process step. The tool's precision is aided by its advanced motion control asset, which provides dynamic motion profiling as well as motion stabilization to ensure that patterns are laid down accurately and efficiently. The model is capable of executing extremely fast, high-accuracy movement of substrates in both the X and Y directions. TOKYO ELECTRON ACT12 is also equipped with an advanced imaging equipment, which allows users to inspect and verify patterns as they are created. It utilizes a high-resolution camera to take images of substrates. It can detect micro-defects in the substrate and pass this information to the controller for correction. The system is also supported by an automated wafer cleaning and processing unit, which provides operators with efficient and integrated process control, cleaning, drying, and pre-baking operations. The integrated design allows an efficient and cost-effective workflow to be executed with a minimum of effort. ACT12 is an efficient and cost-effective photoresist processing machine designed to enable a wide range of applications. It is equipped with an advanced process controller, sophisticated software, a gas control station, a high-accuracy and fast motion control tool, and an automated wafer cleaning process. Its high-resolution imaging technology allows it to detect and correct micro-defects in the substrate, and its integrated design and efficient workflow provide users with a powerful and cost-effective tool for their photoresist processing needs.