Used TEL / TOKYO ELECTRON ACT 12 #9290880 for sale

TEL / TOKYO ELECTRON ACT 12
ID: 9290880
Wafer Size: 12"
(4) Coater / (4) Developer system, 12".
TEL / TOKYO ELECTRON ACT 12 is a photoresist equipment designed for microfabrication. The system is an advanced photo resist processing technology that enables customers to produce semiconductor devices with unsurpassed accuracy, repeatability, and speed. It consists of several components including a UV source, automatic exposure control, and automatic alignment unit. The UV source is a high energy xenon arc lamp that emits UV light which is used to expose the pattern on the photoresist. The emitted light is focused through a mirror lens and directed onto the wafer. The automatic exposure control monitors and adjusts the light intensity to ensure consistent exposure. The automatic alignment machine uses an advanced laser scanner to detect the pattern on the photoresist. The scanner then computes the position and orientation of the photoresist relative to the mask, and adjusts the alignment accordingly. This ensures that the exposed pattern on the photoresist is accurate and repeatable. Once the exposure is complete, the photoresist is developed. Acetone is usually used to remove the exposed portions of the photoresist, leaving a pattern. This pattern is then used as a template for etching the substrate. TEL ACT 12 is a powerful and precise photoresist tool that can process small devices with complex feature sets. With features such as UV sources, automatic exposure control, and automatic alignment asset, it enables customers to produce semiconductor devices with unsurpassed accuracy and repeatability. Additionally, the model is compatible with a wide variety of substrates and resists.
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