Used TEL / TOKYO ELECTRON ACT 12 #9315813 for sale

TEL / TOKYO ELECTRON ACT 12
ID: 9315813
System Dual blocks.
TEL / TOKYO ELECTRON ACT 12 is a photoresist equipment designed for processing chemicals used in the microchip fabrication process. It is designed for the application of photoresists onto semiconductor wafers, and features highly precise measurements and control systems. TEL ACT 12 utilizes a substrate transport system which is used to transfer semiconductor wafers throughout the unit without the use of mechanical pick-up tools. This allows for more precise control over the process, ensuring uniformly high quality results for every batch of wafers that pass through the machine. The photoresist tool is made up of several distinct modules, each of which is responsible for different stages of the wafer manufacturing process. A heating module is used to heat the wafers at precise temperatures and times, ensuring the photoresist is applied evenly and completely. Another module is used to mix and dispense developer chemicals to appropriately develop the photoresist, and also includes precise safety measures to ensure that hazards associated with extremely potent chemicals are very low. The asset also features a control module which is used to configure each stage of the photoresist application process. Through this module, it is possible to configure a given recipe optimally, ensuring that precise concentration levels, dispersal periods, and safety monitoring measures are tailored to the customer's needs and ensures that no hazardous situations arise due to the wrong doses or concentrations. In addition, TOKYO ELECTRON ACT12 is designed with a closed loop model which allows for real-time monitoring and recording of the various parameters associated with each stage of the photoresist process. This provides an additional means of safety checks for users, ensuring that any irregularities in the equipment are addressed immediately while avoiding potential damage to the wafers. Finally, the system is designed to be extremely compact and space-efficient, allowing for the installation of several of these machines in limited areas with minimal disruption to other processes or sets of equipment. This makes it an ideal option for customers who are looking to maximize their processing capabilities without sacrificing valuable floor space. On top of this, the closed nature of ACT 12 guarantees that all processes are closely monitored, preventing unauthorized access or interference from outside sources.
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