Used TEL / TOKYO ELECTRON ACT 12 #9358605 for sale

TEL / TOKYO ELECTRON ACT 12 is a photoresist equipment used in the fabrication of advanced integrated circuits. It is composed of a light source, optics, a spray dispense system, controllers and software. The light source enables precise exposure of the photoresist material, which is then dispensed onto a wafer by the spray dispense unit. The controller and software provide control and supervision of the machine and enable programming of exposure parameters, application of the photoresist, as well as equipment diagnostics. The light source is based on stroboscopic illumination and features an electron beam diode. The electron beam passes the beam emitter, then the lens and finally the slit aperture. By this, the exposure is widened and a uniform light distribution is achieved. The optics are designed to ensure a very uniform illumination pattern on the wafer. The optics contain a color filter and an aperture mask, which optimize the depth-of-field and improve uniformity. The spray dispense tool uses a combination of pressure pulses and low-voltage, high frequency generated electric fields. This enables uniform, accurate and repeatable coverage of the photoresist material onto the wafer. The controllers and software control the operation of the asset, allowing the user to set exposure patterns or to program the entire process. The software also generates on-screen diagnostics, giving the user feedback on the condition of the model and components as well as analysis of the resulting image. In summary, TEL ACT 12 photoresist equipment is a highly precise and efficient method of fabricating complex integrated circuits. By combining a light source, optics, a spray dispense system, controllers, and software the unit is able to deliver high quality and consistent results.