Used TEL / TOKYO ELECTRON ACT 12 #9384924 for sale

TEL / TOKYO ELECTRON ACT 12 is a photoresist equipment developed by TEL Limited (TOKYO ELECTRON) formed from a combination of light source, photomask and projection optics. It is a large-scale registration and patterning system that is used primarily in the semiconductor industry for the production of integrated circuits. The unit consists of three main components including an optical machine, a substrate table, and a control tool. The optical asset has two major components: a light source module and a projection lens. The light source module is comprised of sources such as a short-wavelength excimer laser, a gas laser, and an illumination lamp. The projection lenses used in the optical model are designed to provide the highest quality image focusing for copying patterns onto the substrates with precision. A high-precision 5-axis substrate stage is used to accurately position the wafer under the projection lens. The 5-axis stage offers high stability and high precision to support the minimum pattern features that can be resolved in the most recent technologies. The control equipment is based on a Windows OS platform, allowing user-friendly operation. It includes automatic alignment functions, as well as other sophisticated patterning control features. The system can be used to create repeating patterns through the use of a single photomask. Alternatively, the unit can use multiple photomasks orchestrated in sequence for more complex patterns. TEL ACT 12 is designed for high-volume production with its high-throughput, low-cost, reliability and maintainability, which enables the company to offer customers an efficient and effective tool to convert their designs into physical devices. The machine is suitable for creating a wide variety of components, including RF components, thin film transistors, memory chips, and complex processor designs. As its minimum width can attain as small as 7nm, it is suited for the production of components that require schematic and micromachined patterns on a single die. In summary, TOKYO ELECTRON ACT12 is an advanced photoresist tool consisting of high-precision optical components, a 5-axis substrate stage, and a sophisticated control asset. With its excellent performance and high quality, the model is ideal for the production of components requiring miniature and intricate patterns, making it an invaluable tool for the semiconductor industry.