Used TEL / TOKYO ELECTRON ACT 8 #9113642 for sale

TEL / TOKYO ELECTRON ACT 8 is a photoresist equipment for patterning thin film surfaces. It is designed for precision lithography processing in research and development of semiconductor device fabrication, for the production of complex nanostructures with small feature sizes and high levels of repeatability. The system is equipped with an 8-inch angle compensated projection lithography (ACPL) unit, allowing for imaging onto a broad range of substrate materials without distortion or deformation of the pattern. It features an advanced optical machine which combines specialized lenses and digital-processing algorithms to accurately project a wide range of structured patterns at a high resolution. The tool is built on a platform optimized for multi-party interoperability, allowing for integration with a range of substrate pedestals, test stand equipment, and robot systems. This integrated asset can deliver sophisticated, high-precision imaging solutions in areas such as micro-optics, micro-photonic devices, and patterns down to the nanometer scale. TEL ACT 8 is also capable of process debugging with integrated in-situ image evaluation. This feedback loop from patterning to outcome allows for more rapid optimization of the patterning process. The removal of residual resist layers and other deposited materials is achieved using a wet chemical based cleaning model. The equipment is also equipped with a range of applications-focused features including advanced patterning techniques such as grayscale lithography, maskless lithography and directional selective exposure. Overall, TOKYO ELECTRON ACT 8 is a high performance, reliable photoresist system for advanced patterning technologies at small feature sizes. The unit's integrated design and enhanced applications focus ensure high repeatability, flexibility, and easy handling for its users.