Used TEL / TOKYO ELECTRON ACT 8 #9121685 for sale

TEL / TOKYO ELECTRON ACT 8 is a photoresist equipment designed to etch, expose, align and develop photomasks, or photomasks used in the fabrication of semiconductor devices. It is an advanced photolithography system with a sophisticated microprocessor-controlled stepper unit. The most advanced feature of TEL ACT 8 is its ability to precisely align the photomask with respect to the wafer. The machine allows for accurate and repeatable alignment with an accuracy of +/- 2 microns. This ensures that whatever pattern is exposed onto the wafer will be accurately registered to the mask. The tool also has a state-of-the-art multi-stage exposure asset that allows for fast, accurate exposures. The model includes a resist spinner and a 10,000 rpm spinner controlled by a precision microprocessor. This allows for accurate, repeatable and uniform deposition of resist material. TOKYO ELECTRON ACT 8 also features a very accurate, repeatable vacuum chuck. This permits the wafer to be held firmly without slipping, prevent any contamination of the wafer surface. The equipment includes a light source, either DUV (deep ultraviolet) or IR (infrared) which allows for specific wavelengths of light to be used for the exposure. Also included is a process gas handling system that can be utilized for chemical ashing during the development step, as well as controlling the atmosphere and temperature during the etching and developing process. The exposure and develop unit features a high-resolution camera which allows for observation of the development process in real-time, as well as providing a through-focus view, meaning that even at small feature sizes the exposure and develop process can be optimized for the desired result. TEL / TOKYO ELECTRON ACT 8 is also capable of monitoring the environmental conditions within the processing chamber, including temperature, humidity, gas flow, and pressure sensing. This ensures consistent process results, and is an important feature for many processes requiring precise environmental conditions. ACT 8 is a reliable photolithography unit, with accurate, repeatable alignment and a sophisticated automated exposure and develop machine. Its fully automated operation makes it an ideal choice for any production environment.