Used TEL / TOKYO ELECTRON ACT 8 #9145487 for sale

TEL / TOKYO ELECTRON ACT 8 is a photoresist (chemically active) equipment designed to aid in the production of integrated circuits. This system utilizes photosensitive chemicals, or photoresist, to create precise images on the surface of a semiconductor substrate. Photoresist is a type of photosensitive material that contains chemicals that respond to light. TEL ACT 8 unit includes a photoresist-coating module, an alignment module, and a UV exposure light source. The photoresist-coating module is used to evenly spread photoresist on the wafer surface to create a layer that is suitable for the subsequent exposed imaging process. The alignment module is mounted on the microscope stage and contains multiple wafer aligning mechanisms. The alignment mechanism guides the wafer into certain positions for proper imaging. The UV exposure light source is also mounted on the microscope stage. It uses UV light to expose the photoresist, activating the chemistry and creating the pattern that will be transferred to the substrate below. This light source has the capability to create high-resolution images with feature sizes as small as 5nm. Once the photoresist has been exposed, a processing module is used to develop the image. This module etches away the unexposed photoresist, revealing the pattern beneath. After the imaging process is complete, further processing steps are conducted to complete the circuit. This may include baking, etching, and deposition. TOKYO ELECTRON ACT 8 machine is highly reliable, with a processing rate of up to 180 wafers per hour. In addition, it is capable of producing patterns down to 5 nm feature size. This tool is widely used in semiconductor manufacturing to produce high-performance circuits with a high yield rate.