Used TEL / TOKYO ELECTRON ACT 8 #9159075 for sale
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ID: 9159075
Wafer Size: 8"
(2) Coater / (2) Developer system, 8"
(7) LHP
(3) CHP
(1) HHP
(5) CPL
(1) CWL
(2) TRS
(1) ADH.
TEL / TOKYO ELECTRON ACT 8 is an advanced photolithography equipment developed for fabrication of high resolution, high precision microelectronics. The system has powerful optics, scanning, and image processing capabilities, enabling users to produce devices with microscopic features and incredibly small structures. The unit is composed of a number of components. An excimer laser with a maximum wavelength of 248nm is employed to directly image a photoresist film. The photoresist film is prepared in a special coating chamber where it is evenly dispersed through the use of an inert gas. This allows the laser to accurately form the structures needed for the creation of small devices. The optics of the machine are composed of a series of lenses which focus and refocus the laser beam. To provide fine detail, the lens systems are designed with extremely small tolerances. They consist of two separate groups; one group for initial imaging and a second for advancing feature size. These groups are also equipped with several additional devices which fine tune the quality of the imaging. To accurately direct the laser beam, an electronically-controlled galvanometric scanning mirror is featured. With this tool, any angle can be scanned quickly and accurately for forming of extremely small and complex microelectronics. The image processing abilities of TEL ACT 8 are integral to creating highly precise devices. A digital image processor is employed to recognize any irregularities and compensate to assure exact conformity. Features can even be detected down to the nanometer level for accuracy and quality assurance. TOKYO ELECTRON ACT 8 also features robust after-imaging solutions. Following the imaging process, a series of advanced treatments are preformed to further enhance the device's performance. Gas treatments can be used for superior adhesion and alkali treatments can be used for increased conductiveness. ACT 8 with its powerful optics, scanning, and image processing abilities, is an invaluable asset for creation of microelectronic devices. Its advanced features and after-imaging solutions enable users to create devices with improved performance and small, complex features.
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