Used TEL / TOKYO ELECTRON ACT 8 #9181934 for sale
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ID: 9181934
Wafer Size: 8"
Vintage: 2000
(2) Coaters / (2) Developers system, 8"
Software version: 1.18.003
Hardware configuration (Fab):
Main system:
(1) Main body CS block
(1) Main body process block
(1) Main body interface block
(1) T&H controller
(1) Chemical cabinet
SMIF System:
(4) SMIF Indexers
Hardware configuration (Subfab / Auxilliary Units):
(1) AC Power box
Equipment configuration:
Software: JapDOS
Controller: Silicon disk
Floppy disk drive: 3.5"
Hardware:
(4) Indexers
(3) Robot arms
(5) Cool plates
(6) Low temp hot plates
(2) Hot plates
(1) AD Unit
(1) WEE
(1) Cup wash
2000 vintage.
TEL / TOKYO ELECTRON ACT 8 is a photoresist equipment developed by TEL (TOKYO ELECTRON). This system can be used for a variety of applications such as photolithography, mask and etching processes. This photoresist unit has a number of features which make it an excellent choice for use in a variety of photolithographic processes. First of all, this photoresist machine utilizes a special type of exposure head which can be adjusted to provide different levels of exposure. This enables the user to adjust the exposure according to the photolithographic process they are working with. Additionally, this photoresist tool also uses a highly-sensitive generation of resist that is used to provide excellent resist uniformity and reliable patterning. This resist can also be used with a range of film thicknesses. Furthermore, TEL ACT 8 also features an Auto Exposure Sensor Asset which is capable of determining the optimum exposure for each photolithography process. This model will provide users with an automated process for setting up and controlling exposure settings in order to ensure consistent results. The equipment also includes a variety of other features, such as an automated defect inspection system, an on-board monitor, an alarm unit, and a vacuum unit for removing film from the substrate. It also includes an auto-closing shutter. In addition, the machine can also be integrated with an external wafer handling robot for automated wafer manipulation. TOKYO ELECTRON ACT 8 is designed to be a simple, cost-effective solution for photolithography processes. It is easy to use and offers reliable performance with excellent results. Both small and large-scale manufacturing facilities will be able to gain great benefits from integrating this tool into their production processes.
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