Used TEL / TOKYO ELECTRON ACT 8 #9213368 for sale

TEL / TOKYO ELECTRON ACT 8
ID: 9213368
Wafer Size: 6"
Coater / Developer system, 6".
TEL / TOKYO ELECTRON ACT 8 is a state-of-the-art photoresist equipment that is ideal for use in semiconductor device manufacturing applications. This system combines advanced technology with reliability and ease of use to ensure process consistency and improve yield. The unit starts with a substrate which is then coated with a photosensitive resist material known as photoresist. Once coated, the resist is exposed to ultraviolet light which polymerizes the exposed area. This exposed area then becomes insensitive to a subsequent chemical etching process which removes the unexposed areas. TEL ACT 8 utilizes a seven-axis motion control machine to precisely dose and control exposure dose rates. This allows for high-resolution patterning and improved process yield. The whole tool can be integrated into a wide range of device manufacturing processes. As part of this integration, the control software provides an operator interface which makes operation and recipe creation easier and more reliable. The asset also features an advanced imaging model. This allows for precise determination of the etch profiles and the subsequent analysis of the data from the processes. This sophisticated imaging equipment ensures that the resist is removed in a controlled manner which allows for precise control of the subsequent device manufacturing process. TOKYO ELECTRON ACT 8 provides all the features needed to perform reliable photoresist processing. This includes automated wafer handling delivery, exposure dose control, patterning, etching and imaging. This ensures that effective process control is achieved and ensures process consistency which leads to improved device yield. TEL / TOKYO ELECTRON ACT 8 is a complete solutions system for photoresist processes. This advanced unit features modern technology and reliable operations to ensure a consistent and efficient process. This machine is sure to bring significant benefits to device manufacturers and users alike.
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