Used TEL / TOKYO ELECTRON ACT 8 #9251356 for sale

TEL / TOKYO ELECTRON ACT 8 is a photoresist equipment developed by TEL (TOKYO ELECTRON) that is designed for electronic device processing. It is suitable for large scale and fine line lithography for devices such as gate electrodes, interconnection patterns, and contact plug formation. The system comprises a light source, exposure chamber, and exposure control unit. The light source is a high power ultra-violet excimer laser which provides stable illumination in the deep UV range. It is able to provide an optimized exposure profile with uniform linewidth andheight to ensure accurate printing of patterns. In addition, the exposure chamber features a high-precision optical machine for consistent patterning. The combination of two lenses, a condenser and a projection lens, focuses high irradiance of light onto the photoresist. The exposure control tool is a fully automated process that enables precise control of the dose and miniaturization of patterns. This ensures high quality pattern formation and superior performance over manual operations. It is integrated with a user friendly GUI (Graphical User Interface) and programmable exposure parameter management. This feature allows for batch processing and further decreases exposure time and cost. Overall, TEL ACT 8 is a reliable and easy to operate photoresist asset. Its features and performance permit high precision pattern formation and minimized defects. The model can be used for a variety of applications such as semiconductor device fabrication, thin-film device processing, and printed circuit board manufacturing.