Used TEL / TOKYO ELECTRON ACT 8 #9262481 for sale

TEL / TOKYO ELECTRON ACT 8
ID: 9262481
System.
TEL / TOKYO ELECTRON ACT 8 is a fully automated photoresist equipment that provides superior accuracy and repeatability. This system utilizes high-resolution imaging optics, precise motion control, and advanced software algorithms to ensure chemically amplified resist processing consistency. The optics of TEL ACT 8 give it the accuracy and resolution necessary for photolithography imaging. The optics unit includes a high-power mercury arc lamp, an optical condenser, an illumination machine, an optically masked projection tool for imaging onto the wafer, and a processor unit with regiogen driven focus mechanism that can detect, measure, and control focus. The optics are configured to take 3D images for maximum accuracy. The chassis of TOKYO ELECTRON ACT 8 include an outboard motor motor control asset that drives the motion of the high-precision robotic arm for precise positioning of the machine and exposure of the wafer. This model also includes a tensioning device that ensures the proper tensioning of the mask during imaging and processing steps. The software of TEL / TOKYO ELECTRON ACT 8 is designed to provide uniform deposition and exposure parameters over any given part of the wafer being processed. The software also includes multiple process parameter monitoring functions and diagnostic and feedback mechanisms that allow for adjustment of parameters to maintain consistent performance. ACT 8 photoresist equipment is the most accurate and reliable system available on the market. It is well suited for semiconductor and microsystems fabrication, as well as other photoresist related processes. The accuracy and repeatability offered by this unit allows for extremely precise image transfer and the highest quality device fabrication.
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