Used TEL / TOKYO ELECTRON ACT 8 #9269550 for sale
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ID: 9269550
Vintage: 2012
(2) Coater / (2) Developer system
(2) Edgeless bellow pumps
Main block
PR Process
2012 vintage.
TEL / TOKYO ELECTRON ACT 8 is a photoresist equipment designed for optimal film formation and patterning performance. It is a highly advanced photolithographic system developed specifically for advanced R&D and high-volume production semiconductor device fabrication. The unit features an improved film material deposition process, with the ability to produce thin and thick films in a wide variety of film materials. These films can be patterned quickly and efficiently with the machine's advanced imaging tool. The asset is highly accurate, allowing for precise patterning of structures such as VLSI circuits and high-speed contacts. TEL ACT 8 features a 500-micron resolution stepper-type imaging model. It includes an ultra-high resolution auto focus and fine alignment capabilities, and can handle both positive and negative photoresists. The advanced photolithography equipment includes a powerful spatial light modulator (SLM) and laser alignment device, making it suitable for complicated patterns. The equipment also offers high-speed pattern generation process with a fast and accurate print head. The pattern size, shape and aspect ratio can also be easily adjusted with the proprietary software. This makes the system useful for wet and dry processing of a variety of films, including thermally and electrochemically-grown materials. The unit is also equipped with vacuum and temperature systems for controlled deposition and processing. This combination of technologies provides the highest level of accuracy for fine lithography masks and precise patterning. TOKYO ELECTRON ACT 8 is a powerful and reliable photolithographic machine designed to meet the needs of high-performance production and research facilities. Its versatility and precision make it the perfect tool for accurate lithography work and reliable results for all of your semiconductor device fabrication requirements.
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