Used TEL / TOKYO ELECTRON ACT 8 #9283381 for sale

ID#: 9283381

Model:

ACT 8

Category:

PHOTORESIST

Vintage:

2003

Wafer Size:

8"

Equipment Details:

Coater / Developer system, 8"
Machine type: L-Type
Single block
Main controller: M/C Normal installation

Configuration:
Coat process station (COT):
(2) Nozzles
RRC Pump

Solvent automatic supply: (2) Tank auto supplies / TEL Standard
Side rinse (EBR)
(2) Back Side Rinses (BSR)

Develop process station (DEV):
Nozzle
H Type

Dev Solution automatic supply: (2) Tank auto supplies / TEL Standard
Rinse nozzle
(2) Back Side Rinses

Adhesion process station
(6) Low temperature hot plate stations (LHP)
(2) High temperature hot plate process stations (HHP)
(4) Chilling plate process stations (CPL)
(2) Transition stage units (TRS)

AC Power box
Chemical box
Temperature controller
KOMATSU (SPA-1882-A) T&H

2003 vintage.
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