Used TEL / TOKYO ELECTRON ACT 8 #9314464 for sale

TEL / TOKYO ELECTRON ACT 8 is a photoresist equipment with advanced chemical processing for photolithography. It takes advantage of chemical beamsplitting technology to offer high precision and accuracy in etching patterns onto photoresist film. The system is mainly used in semiconductor production and device fabrication, and is designed to be user-friendly and efficient. The unit uses four-beam scanning to maximize pattern accuracy and precision, along with a variable angle ejector to reduce edge roughness. It also makes use of advanced electron beam imaging (EBI) for high-resolution imaging capabilities. With EBI, images can be taken down to a resolution of 2.5 microns. An anti-moire function is included to prevent image distortions. The machine includes a glassy carbon stage for sturdiness and durability, an inert gas cleaning station for environmental friendliness, and a stainless steel guide plate for precise exposure. The series maintains a stable resist thickness and CD (critical dimension) over photographs. The photoresist tool is completed with a number of automated and manual controls. It is equipped with automation features such as an automated gas flush station, high-speed control that allows for high-speed processing of up to 150 m/s, and offline pattern editing. Additionally, manual controls offer a more precise control over the process, including a global mask edit, an adjustable light intensity, and an adjustable mask pattern size. TEL ACT 8 has been designed to be both user and environmentally friendly. It requires little maintenance, and its clean and open design ensures a safe and comfortable working environment. The asset is certified with the Quality Management Model ISO14001 for environmental management systems. This advanced photoresist equipment is ideal for semiconductor production and device fabrication processes. It offers high-precision patterns, stable resist thickness, and high-quality imaging, all while maintaining an eco-friendly and user-friendly design.