Used TEL / TOKYO ELECTRON ACT 8 #9357239 for sale
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ID: 9357239
Wafer Size: 8"
Vintage: 2001
Coater / Developer system, 8"
Main frame with controller
Carrier station:
Type: Normal uni-cassette
(4) Cassette stages
Pickup cassette
Coater:
(3) Dispense nozzle with temperature controller for etcher
RRC Pump
Rinse nozzle: Back / EBR / Solvent bath for etch unit
Rinse:
(2) Buffer tanks: 3 Liter
PR Suck-back valve
Direct drain
TARC Coater:
(2) Dispense nozzle with temperature controller for etcher
RRC Pump
Rinse nozzle: Back / EBR / Solvent bath
Rinse:
(2) Buffer tanks: 3 Liters
PR Suck-back valve
Direct drain
Developer:
SH Nozzle
(2) Stream nozzles for DI rinse
(2) Buffer tanks: 3 Liters
Temperature controller
Direct drain
(3) Adhesions:
100% Sealing closed chamber (Built-in hot plate)
HMDS Tank with float sensor
(15) Low Temperature Hot Plates (LHP)
(14) Chill Plates (CPL)
TCP Module
(3) TRS Modules
Wafer Edge Exposure (WEE) module:
Wafer type: Notch, DUV
Notch
DUV
Chemical cabinet 1: Solvent and developer
Chemical cabinet 2: PR and HMDS
(2) TEL OEM Temperature controllers
AC Power box
Interface
Missing parts:
2-1 COT Spin I/O Board
2-4 COT EBR Nozzle tip
2-4 COT EBR Nozzle valve
2-1 Nozzle changer motor
3-2 Shutter cylinder
(2) PRB YASUKAWA Spin motor drivers
2-0 PRA Z-Driver
3-0 PRA Z-Driver
Temperature and humidity controller (For 4 chu)
Hard Disk Drive (HDD)
2001 vintage.
TEL / TOKYO ELECTRON ACT 8 is a state-of-the-art photoresist equipment. It is designed to provide industry leading precision and accuracy in the photolithography process. Photolithography is a critical step in the manufacturing of many electronic components. TEL ACT 8 system utilizes a high precision mask aligner to accurately transfer a pattern to a photoresist material. The pattern is transferred to a substrate material with a high rate of speed and accuracy. TOKYO ELECTRON ACT 8 features a powerful stepper motor and a proprietary control unit. This allows for rapid and precise alignment of the mask with the substrate. The resolution of the mask aligner is 25 nanometres, which provides high accuracy and repeatability. The machine is also capable of image processing of the mask and can control the light dose of each layer based on the complexity of the pattern. ACT 8 is also equipped with a powerful cleanroom environment. The air is filtered and controlled to a very high degree. This ensures that even the most fragile and miniature components are not exposed to any contamination. The cleanroom also helps by controlling the humidity, which is important for controlling the rate of exposure of the photoresist. TOKYO ELECTRON ACT 8 is also equipped with advanced software that is used for controlling the entire tool. The software is able to control the light exposure in a wide range of patterns. It is also able to control the temperature of the substrate and the mask, which is important for controlling the shrinkage of the photoresist. TEL / TOKYO ELECTRON ACT 8 is a highly flexible and accurate photoresist asset. It is capable of producing high quality parts with high repeatability. The powerful motor and advanced software make it possible to produce precision parts with high throughput. The sophisticated environmental controls make sure that even the most delicate components are not contaminated. The model is designed for high volume production of small components.
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