Used TEL / TOKYO ELECTRON ACT 8 #9401926 for sale
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ID: 9401926
Wafer Size: 8"
Vintage: 2001
(3) Coater / (3) Developer system, 8"
AC Power box
Wafer flow: Left to right
Controller
THC: ESA-4-D-02
IFB
Coater unit:
2-1, 2-2: (8) Dispense nozzles
2-3: (4) Dispense nozzles
RRC Pump
Developer unit:
E3 Nozzle
TCU:
(7) CLLO Power sources
(8) Pumps
Chemical box 1:
PR Bottle
(8) RRC Pumps
Chemical box 2:
HMDS
Thinner: (2) Tanks auto supply
DEV: (2) Tanks auto supply
Missing parts:
3-1, 3-3: Spin motor driver
IRA Main Y driver, Z driver
WEE Lamp house
2001 vintage.
TEL / TOKYO ELECTRON ACT 8 is a state-of-the-art photoresist equipment designed specifically for research and development applications. This system features dual sensor technology to detect the presence of photoresist in a substrate. It can also be used to detect irregularities in patterning processes within a substrate, making it the ideal choice for research. The unit's dual sensors provide terrific resolution, featuring an ultra-high resolution of 0.1 to 7.0 microns that is capable of patterning patterns for various research and production applications. Along with excellent precision, TEL ACT 8 is also equipped with temperature and voltage regulators to ensure accurate results. The sensors also allow for detection of photo resist at different depths throughout the substrate. TOKYO ELECTRON ACT 8 also offers a variety of software tools, including electrical, mechanical and optical testing parameters. It can simulate film deposition, plasma etching and many other processes. Additionally, the machine boasts the ability to store different process parameters for future reference, so that researchers can easily repeat a task or modify the process. In addition to its primary functions, TEL ACT 8 also features a host of integrated control peripherals, such as a power monitor, automatic thickness controller and a vacuum chamber. These features make the tool a highly valued asset by research and development professionals alike. Overall, ACT 8 is a reliable, accurate photoresist asset designed with research and development applications in mind. Its dual sensor technology enables the user to detect irregularities in patterning processes and store process parameters for future reference. With a host of integrated control peripherals, TEL / TOKYO ELECTRON ACT 8 enables users to simulate and control various processes while storing important data. This makes it an invaluable tool for research and production applications.
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