Used TEL / TOKYO ELECTRON ACT #9290877 for sale
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TEL / TOKYO ELECTRON ACT (TEACT) photoresist equipment is a leading-edge technology designed for patterning semiconductor wafers with a high degree of precision. The TEACT system uses a proprietary deep ultraviolet (DUV) light source to irradiate photoresist-coated wafers, precisely controlling the patterning process. The unit comprises several key components, including an automated controller (ACU), pattern generator (PG), radiant energy source (RES), and power supply (PS). The ACU is the control centre for the TEACT machine, allowing users to control each aspect of the wafer patterning process. The ACU interfaces with the PG to generate and control the pattern that is being applied to the wafer. The PG uses a vector format for format patterning, allowing for the application of intricate patterns with precision. The RES is the DUV light source used in the TEACT tool. This state-of-the-art light source produces short wavelength radiation, ranging from 193nm to 248nm, allowing for extremely precise patterning. The source can be automated, allowing for large-scale production of perfectly patterned layers on wafers. The PS supplies power to the RES, controlling the amount of energy being applied to the photoresist layers on the wafers. This helps to ensure that the photoresist is exposed to an even and consistent amount of light. The TEACT asset provides users with state-of-the-art precision patterning capabilities. It's automated control allows for production of perfectly structured layers on wafers, making it the ideal solution for semiconductor wafer patterning. The model's next-generation DUV RES promotes even exposure of the photoresist layers, while the customizable ACU-PG interface allows users to control every aspect of the patterning process. With TEL ACT equipment, users are assured of exceptional results no matter the application.
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