Used TEL / TOKYO ELECTRON CL1300 #293607974 for sale

TEL / TOKYO ELECTRON CL1300 is a photoresist equipment used in a variety of applications, including Semiconductor and Thin Film deposition/etch, LED manufacturing, and Surface Mount Technology. This system is equipped with a high-end optical imaging stage, allowing for precise focus and alignment control. This is coupled with a 6-zone platform, which provides advanced temperature uniformity and control. TEL CL1300 offers superior sensitivity and resolution, enabling it to detect and process features down to 0.1 micron. Utilizing the unit's advanced UV exposure head, users can achieve line edge/width control of 0.5 micron or better. It also utilizes a variety of advanced directional exposure techniques, such as off-axis-directional and off-axis-axial exposure. The machine is designed for efficient production processes. It can feed photoresist roll stock from three different sources simultaneously, and each source can have its own exposure settings. Additionally, a range of alarms, such as temperature rage, chemical contamination, and power failure, allow for fast and easy troubleshooting. TOKYO ELECTRON CL1300 is also built for chemical management. It includes precise dosing functions, as well as a comprehensive recipe management tool, allowing users to intuitively manage blanket resist, exposure resist and post-develop resist. Moreover, chemical tanks can be monitored through a number of options, such as pressure, chemical concentrations, and temperature. Finally, the asset offers a wide range of options, such as integrated loaders, sorters, and trays, as well as automated quality inspection tools, like an advanced optical inspection model (AOIS). In conclusion, CL1300 is a powerful and cost-effective photoresist equipment, offering a wide range of features and capabilities for a variety of applications.