Used TEL / TOKYO ELECTRON Clean Track ACT 12 #9087044 for sale

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ID: 9087044
Wafer Size: 12"
Vintage: 2003
Dual block coater / developer system, 12" Track configuration 1: Coat cup: 1 BARC cup: 1 Top Coat cup: 1 Developer cup: 2 ADH: 1 Track configuration 2: Resist Reduction: RRC Dev Nozzle: LD Resist pump: RDS 4ml Oven Configuration: PEB: PHP x3 BCT: PHP x2 COT: PHP x2 Post bake: CHP x3 Track chemicals: Resist supply: Gallon bottle Thinner: OK73 Currently installed 2003 vintage.
TEL / TOKYO ELECTRON Clean Track ACT 12 is a photoresist cleaning equipment used in the processing of semiconductor devices from TEL Limited. The photoresist cleaning system is designed for efficient and effective removal of photoresist residue and silicone contamination from the surface of IC chips. The unit consists of a resistive track connected to a megasonic unit, a resistive plating tank, an electron beam irradiation chamber and an infrared CCD camera that are all operated by a control panel. The resistive track with the megasonic unit is used to remove the photoresist residues from the IC chip surfaces using high-frequency sound waves. The resistive plating tank is used to deposit a conductive layer on the chip, allowing for the electron beam irradiation chamber to be used to irradiate the chips with an electron beam, which ensures complete removal of the photoresist residues. The infrared CCD camera is used to detect any remaining photoresist residues in order to ensure that the cleaning process has been successful. The use of TEL Clean Track ACT 12 ensures efficient and cost effective cleaning of IC chips that are used in electronic devices. The use of the machine also mitigates any issues caused by photoresist residue not being completely removed, which can lead to device failure. In addition, the tool's high quality electron beam irradiation chamber ensures that the quality of the IC chips is not compromised. TOKYO ELECTRON Clean Track ACT 12 is a reliable and cost effective method of photoresist residue removal and silicone contamination cleaning, ensuring reliable operation of electronic devices. It is easy to use and efficient, ensuring that IC chips come out cleaned with the highest quality. It is a reliable asset that helps ensure proper electrical operation of the IC chips, reducing product failure and protecting both the customer and the manufacturer.
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