Used TEL / TOKYO ELECTRON Clean Track ACT 12 #9106026 for sale

TEL / TOKYO ELECTRON Clean Track ACT 12 is a photoresist equipment designed to produce the highest level of device cleanliness and baked product images. The system allows users to process a variety of substrates, including semiconductor wafers, flexible printed circuits, taped carriers, and optical films, as well as various etch back grades, such as photo, polyimide, and E-beam. The unit's ACT 12 head is a one-step pre-processing head, which behaves as an automated particle removal machine. It is equipped with multiple technologies, including ultrasonic vibration, thermal burst, and jet cleaning, and can be used to process both straight and angled substrates. The tool can also track and control the process temperature with its integrated cooling and heating technologies. Apart from automated particle removal, the asset also provides a multi-directional spray, which evenly covers the entire substrate surface and uniformly applies the photoresist. This ensures uniform thickness and repeatable patterns on the substrate. The model is equipped with a spun- stainless steel cassette, which ensures long-term use and expedites high-end mask patterns. TEL Clean Track ACT 12 is designed to provide high productivity and low cost of ownership. It can achieve high throughput of up to 150 wafers per hour with the 24-row configuration. The equipment is also designed with high-accuracy sensing and control systems, ensuring accurate placement and uniformity of the patterned structures. It is also equipped with a digital camera system that can check each substrate before processing starts. Moreover, TOKYO ELECTRON Clean Track ACT 12 unit has an integrated track and load/unload machine with an automatic barcode distribution tool. It also has a compact design that is suitable for a cleanroom environment. The asset comes with a centralized control body to oversee and adjust process conditions with an easy-to-use graphical user interface. It is also equipped with a self-diagnosis and analysis model for remote control and analysis.