Used TEL / TOKYO ELECTRON Clean Track ACT 12 #9106048 for sale

TEL / TOKYO ELECTRON Clean Track ACT 12 is a photoresist equipment that enables precise and accurate patterning of substrates. The system is compact and provides easy and simplified operation. It includes an improved filtration unit, equipped with an anti-particle machine that can maintain a clean environment inside the chamber. The substrate holder can be automatically adjusted, and the tool also allows for more operational flexibility. The asset has a multi-zone contactless measurement model that can accurately measure the substrates to ensure correct alignment with masks. It is also equipped with a high accuracy dose control equipment with a wide range of dose and energy levels to achieve optimal results. The system is capable of patterning substrates of all sizes for a wide variety of applications. The exposure unit includes an 870nm ArF laser illuminator with a proprietary scanning technology to ensure a stable, uniform beam of light for the desired pattern. The machine has a high resolution imaging tool, with a maximum resolution of 512x512 dpi. This image asset is A 10-bit well-maintained and all the images are capture with great accuracy and clarity. TEL Clean Track ACT 12 also includes a number of cleaning functions, such as Ion shower cleaning and Indexing cleaning. Ion shower cleaning bombards the substrate with ions, while Indexing cleaning is a contactless method that uses a magnetically-based brush to clean the area. The model also has a back-up pump equipment, which is a secondary pump system to ensure that the unit maintains the required environmental conditions. The machine is equipped with a range of safety features, such as a built-in interlock tool and an anti-static asset. Lastly, the model also allows for remote monitoring and control via Ethernet or RS232 ports that can be accessed through a user interface. This allows users to quickly and easily adjust parameters and troubleshoot any issues quickly.