Used TEL / TOKYO ELECTRON Clean Track ACT 12 #9106173 for sale

Name: TEL / TOKYO ELECTRON Clean Track ACT 12
Brand: TEL / TOKYO ELECTRON
SKU: 9106173
Availability: InStock

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Photo Used TEL / TOKYO ELECTRON Clean Track ACT 12 For Sale

Photoresist

Manufacturer

TEL / TOKYO ELECTRON

Model

Clean Track ACT 12

ID: 9106173

Wafer Size: 8"

Process Block Robotic Arms, 8" PRA X-Axis Assy: CT2985-469941-W2 - X Axis Assy (ACT 12), Common CT2910-200980-13 - X Base (300) CT2910-401477-11 - X Side Plate (Qty 2) CT2910-401979-11 - Bracket, Motor (Qty 3) CT2910-408714-11 - Sensor Bracket (Qty 3) CT2910-405673-11 - X3 Plate CT2910-405674-11 - X3 Plate CT2910-405672-11 - Guide Block (Qty 3) CT2910-403428-11 - Belt Block (Qty 3) CT2910-401512-11 - Belt Block (Qty 3) CT2910-405691-11 - Sensor Shutter (Qty 3) CT2910-405675-12 - X1 Block CT2910-405676-12 - X1 Block CT2910-405677-12 - X2 Block (Qty 2) CT2910-403433-12 - X2 Block (Qty 2) CT2910-403533-12 - X3 Block (Qty 2) CT2910-307254-11 - X2 Plate CT2910-307255-11 - X2 Plate CT2910-402169-11 - X2 Plate CT2910-402170-11 - Plate CT2910-400001-13 - WAF Sensor Cover CT2910-400743-11 - WAF Sensor Bracket CT2910-403435-11 - C Cover (1) CT2910-490117-11 - C Cover (2) CT2910-401535-11 - Nut Plate (Qty 2) CT2910-401550-11 - Cover Bracket (Qty 4) CT2910-403488-11 - X Cover (Qty 2) CT2910-403436-11 - X Cover (Qty 4) CT2910-303738-11 - X Cover CT2910-303739-11 - X Cover (Qty 20) CT2910-303740-11 - X Cover CT2902-400038-11 - Pulley (3-20) (Qty 3) CT2902-400061-11 - LM Guide (Qty 6) CT2910-310059-11 - Bracket (Qty 2) CT2910-407741-11 - Cable Rail (Qty 3) CT2910-408715-11 - Stopper Block (Qty 12) CT2910-410980-11 - Cover, Belt (Qty 3) CT023-001515-1 - Belt, Timing 1290-3GT-6 (Qty 3) CT023-001777-1 - Belt, Timing 192-3GT-6 (Qty 3) CT044-001407-1 - Support, PCB SA6-43 (Qty 4) CT044-001058-1 - Support, PCB SA6-20 (Qty 8) CT044-000044-1 - Support, PCB EM-3 (Qty 2) CT2986-402862-W2 - 12" PRA X Axis Assy: CT2986-401770-11 - 12" X1 Motor Assy CT2986-401771-11 - 12" X2 Motor Assy CT2986-401772-11 - 12" X3 Motor Assy CT2986-401773-11 - 12" X Home Sensor Assy CT2986-427122-11 - Sensor, 12 Light #01 680 (Assy) CT2986-427123-11 - Sensor, 12 Detect #01 620 (Assy) CT2986-401776-11 - 12" WAF Signal Cable CT2985-442959-W1 - Base (ACT 12) Assy, PRA 8": CT2910-320885-11 - Plate, Upper CT2910-321411-11 - Cover, X CT2910-316994-11 - Frame CT2910-316995-11 - Plate, Upper CT2910-316996-11 - Plate, Lower PRA Z Axis Assy: CT2985-201532-W3 - 300Z Axis Assy CT2910-301544-11 - Top Plate CT2910-100241-12 - Z Main Base CT2910-100242-12 - Z Main Base CT2910-100248-12 - Z Side Base CT2910-100249-12 - Z Side Base CT2910-100250-13 - Z Side Base CT2910-100251-12 - Z Side Base CT2910-301646-12 - Outer Cover (Qty 2) CT2910-100243-12 - Bottom Base CT2910-301655-11 - Z Support CT2910-308116-11 - Z Support CT2910-401047-11 - Position Pin (Qty 4) CT2910-401662-11 - Stopper CT2910-490025-12 - Stopper (Z) (Qty 4) CT2910-490150-12 - Support Arm CT2910-301503-12 - Support Arm CT2910-301522-11 - Support Plate CT2910-301523-12 - Support Plate CT2910-400677-11 - Support Bar CT2910-301524-11 - Guide Block CT2910-301525-11 - Guide Block CT2910-301540-12 - Fan Box (Qty 2) CT2910-401593-11 - Commutation Plate (Qty 2) CT2910-401590-11 - Belt Block CT2910-401591-11 - Belt Block CT2910-313316-11 - Duct Plate CT2910-313317-11 - Duct Plate CT2910-406173-11 - Cable Clamp (Qty 2) CT2910-401594-11 - Belt Clamp (Qty 2) CT2910-401595-11 - Belt Clamp (Qty 6) CT2910-401033-11 - Motor Base CT2910-401034-11 - Block CT2910-300965-11 - Motor Block CT2902-400010-11 - Z Motor Pulley CT2910-300970-11 - Fan Bracket (Qty 4) CT2910-401299-11 - Cable Clamp (Qty 10) CT2910-401753-11 - X Board Bracket CT2910-401592-11 - Sensor Bracket CT2910-490152-11 - Shtr. Z (Qty 2) CT2910-301654-11 - Cable Guide (Qty 2) CT2910-401663-11 - Cable Bracket CT2910-401687-12 - Flat Rail (5-15) CT2910-401664-11 - Cover Bracket (Qty 6) CT2910-401665-11 - Cover Bracket (Qty 2) CT2910-401668-12 - Cover Support (Qty 4) CT2910-301657-11 - Cover Bracket (Qty 2) CT2910-301658-11 - Cover Bracket CT2910-404714-11 - Position Pin (Qty 2) CT018-001971-1 - Linear Way LWHS20C2R1420B-LR (Qty 2) CT023-000961-1 - Belt, Timing 3000-5GT-30 Open CT023-001873-1 - Belt, Timing 456-3GT-9 (Qty 2) CT023-001872-1 - Belt PE-100-2 45*3100C (Qty 3) CT044-001340-1 - Support, PCB FB6-10 (Qty 14) CT2986-402862-W2 - 12" PRA X Axis Assy: CT2986-402847-11 - 12" X Fan Assy (Qty 4) CT2986-401792-11 - 12" X Fan Cable (Qty 4) CT2981-600409-11 - PRA X Board CT2986-401737-W2 - 12" PRA Z Axis Assy: CT2986-401743-11 - 12" Z Motor Assy CT2986-401832-11 - 12" Brake Signal Cable CT2986-401744-11 - 12" Z Home Signal Cable CT2986-401745-11 - 12" Z Fan1 Assy (Qty 6) CT2986-401746-11 - 12" Z Fan2 Assy (Qty 4) CT2986-401747-11 - 12" Z Fan Harness1 CT2986-401748-11 - 12" Z Fan Harness2 CT2986-401749-11 - 12" Z Fan Harness3 CT2986-401750-11 - 12" Z Fan Harness4 CT2986-408336-11 - 12" Brake Off Harness CT2981-600410-11 - PRA Z Board CT2981-600333-11 - Sensor Brd. L Assy PRA Z Cover Assy: CT2985-401531-W2 - Z Cover Assy CT2910-415404-12 - Cover, Z (Qty 3) CT2910-301668-11 - Z Cover CT2910-301669-11 - Z Cover (Qty 2) CT2910-301670-11 - Z Cover CT2910-301671-11 - Z Cover CT2910-301672-11 - Z Cover CT2910-301673-11 - Z Cover CT2910-301674-12 - Z Cover CT2910-301675-11 - Z Cover CT2910-301676-11 - Z Cover CT2910-301699-11 - Z Cover (Qty 2) CT026-100972-1 - Grommet C-30-NG-79-A-1 CT2987-459316-W1 - Sensor Assy, Z Axis (ACT 12): CT2985-489564-W1 - Fixture Assy, Z Axis (ACT12) CT2986-467717-W1 - Sensor, PRA Belt 12 #01 (Qty 2) PRA Theta Axis Assy: CT2985-403791-W1 - 12 Theta Axis Assy CT2910-301722-11 - Motor Base CT2910-402634-13 - Theta Stopper CT2910-402635-11 - Stopper (Qty 2) CT2910-403661-11 - Stopper Base CT2910-401712-11 - Sensor Bracket CT2910-300200-13 - Board Bracket CT2910-301726-11 - Cover CT2910-301727-11 - Cover CT2910-301724-11 - Cover Bracket CT2910-309253-11 - Cover Bracket CT2910-301737-11 - Cover Bracket CT2910-301738-11 - Cover Bracket CT2910-302033-11 - Support Bracket (Qty 2) CT2910-400199-11 - Holder Plate CT022-000903-1 - Bearing 5002DDUU76 LG2L (299880001011 CT2985-403808-W1 - 12 PRA 4C Base Assy: CT2910-100477-13 - 12 PRA-HP Base (4C) CT2910-300496-11 - Support Bar PRA Z, Theta Cable Assy: CT2987-400810-W2 - 12 Z Cable Assy1 CT2986-401738-11 - 12" PRA Z Axis Cable Assy1 CT2985-401549-W1 - Z Cable Assy (25L) CT2987-400811-W2 - 12 Z Cable Assy2: CT2986-401740-11 - 12" PRA Z Axis Cable Assy2 CT2985-401549-W1 - Z Cable Assy (25L) CT2987-400812-W1 - 12 Theta Cable Assy: CT2986-401742-11 - 12" PRA Theta Axis Cable Assy CT2985-401570-W2 - Theta Cable Assy PRA Theta Axis Cable Assy: CT2986-401739-W1 - 12" PRA Theta Axis Assy CT2986-402876-14 - 12" Th. Motor Assy CT2985-401759-11 - 12" Th. Fan Cable1 CT2986-401760-11 - 12" Th. Fan Cable2 CT2986-401761-11 - 12" Th. Fan Cable3 CT2986-401762-11 - 12" Th. Fan Cable4 CT2986-401763-12 - 12" Th. Fan Assy (Qty 4) CT2986-401764-11 - 12" Th. Home Signal Cable CT2986-401765-11 - 12" Brake Off Cable2 CT2981-600333-11 - Sensor Brd. L Assy CT2981-600408-12 - PRA Base Board PRA Pincette Assy: CT2985-432270-W1 - Fork (ACT 12), PRA 8" CT2910-207761-11 - Fork(8"), ACT12 CT2985-40770-W1 WAF Block Assy: CT2904-390016-11 - 8 Inch Standard Block (299880028811 CT020-002765-1 - Bind Screw M2.6*5 SUS304 (Qty 2) Missing main controller.

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TEL / TOKYO ELECTRON Clean Track ACT 12 is a state-of-the-art photoresist equipment with an optimized feature size. It utilizes advanced Active Clamping Technology in its design that enables high sensitivity and stability in the photoresist film. TEL Clean Track ACT 12 from TEL offers an optimized system to accurately and consistently process photoresist and other substrates with extremely low defect rates. TOKYO ELECTRON Clean Track ACT 12 unit controls and controls the entire photoresist process from pre-processing to wafer handling/resist coating. Its top-of-the-line features include a proprietary laser-patterning machine that accurately and precisely prints the design onto the wafer. The unique laser-alignment tool also ensures consistent performance using variable original designs. The asset also includes a post-patterning IC clean module to for gently washing the wafer after coating. This model is designed with a nano fluidic track equipment to prevent turbulence and misalignment of patterning solutions, as well as an advanced, variable edge-bead removal that provides uniform, clean edges. Furthermore, Clean Track ACT 12 integrates an intelligent tracking system for pinpointing defects on the wafer and accurately removing them without damage. TEL / TOKYO ELECTRON Clean Track ACT 12 also integrates an auto-tracking reticle alignment unit (ATRS) to provide quick and reliable pattern accuracy, even across large glass sheets. The machine also incorporates functions to monitor the resist quality to identify deeper imperfections. This tool is integrated with a quality assurance program that continually monitors substrate conditions to ensure consistent, excellent performance in the resists that are produced. TEL Clean Track ACT 12 photoresist asset is designed with ergonomic convenience in mind; its design enables it to fit with user friendly operation without the need to adjust complex alignment settings. Its automated wafer handling model also allows for local cleanup of minor defects using a variety of input patterns. TOKYO ELECTRON Clean Track ACT 12 provides unmatched performance at a very competitive price point. With its unparalleled capabilities, this equipment is ideal for all semiconductor process applications. It is capable of processing advanced semiconductor devices at the highest accuracy levels. With a Clean Track ACT 12 photoresist system installed, any business can provide top notch quality products in the fastest, safest, and most reliable environment.