Used TEL / TOKYO ELECTRON Clean Track ACT 12 #9259909 for sale

TEL / TOKYO ELECTRON Clean Track ACT 12 is a photoresist equipment designed for applications requiring precise resist coating, exposure and developing on substrates such as semiconductor wafers. The system efficiently control resist coating, exposure and developing operations with a built-in timing controller and tight temperature control. The unit features two robot arms that enable accurate resist coating, developing and cleaning within a short period of time. This machine also reduces chemical oxidation of substrates resulting in improved film properties. The photoresist tool consists of a resist chamber equipped with a spray nozzle to precisely apply photoresist over a wafer. The nozzle is capable of applying up to 7 droplets per second onto wafers. The asset also comes with a wafer transfer unit, which enables safe and accurate handling of the wafer. The model also features an exposure chamber. This chamber uses a UV short-wavelength AMLS (amplitude-modulated UV laser equipment) to expose the photoresist. The laser beam is used to directly write patterns onto the wafer's surface. Once the exposure is complete, the photoresist is permanently changed in accordance to the pattern. The system also features an automated chemical treatment unit. This machine includes an automated brush tool to perform chemical cleaning of the wafer during processing. The chemical process chamber, which can be used to perform immersion wet etching, acid etching, photochemical etching, etc., is also equipped in the asset. This enables precise control of the chemical agents used to process the wafers. The model is also equipped with a monitoring and control equipment that enables operators to monitor the chamber temperatures and operating conditions in real-time while controlling processes such as exposure, cleaning, and chemical treatment. The system also provides a user-friendly graphical user interface (GUI) to facilitate operation. The unit has excellent reliability and can achieves accurate coating and patterning on a wide range of substrates. The machine has a wide range of applications in industries such as consumer electronics, medical technology, and automotive semiconductor manufacturing.