Used TEL / TOKYO ELECTRON Clean Track ACT 8 / ACT 12 #9138479 for sale

TEL / TOKYO ELECTRON Clean Track ACT 8 / ACT 12 is a photoresist equipment designed by TEL (TOKYO ELECTRON) for use in high-precision lithography processes. The system consists of two stages: the ACT 8 stage and the ACT 12 stage. The ACT 8 stage is a complete resist-processing unit that applies photoresist to the substrate prior to exposure. It is equipped with a double-scrubber unit to remove any dirt and contamination from the substrate before the resist is applied. The ACT 8 also includes an ASCII controller that allows for programmable recipe control, as well as chemical injection and chemical temperature control. The ACT 12 stage is a critical-dimension metrology and resist-baked unit that measures the critical dimension of any pattern on the substrate post-exposure. It also includes a timer for heating and cooling steps and a heated breathable disk for automated baking. The ACT 12 is outfitted with a variety of state-of-the-art detection methods to ensure maximum accuracy and reliability. The two stages of TEL Clean Track ACT 8 / ACT 12 machine work in tandem to yield superior resist processing. Its advanced technologies provide industry-level accuracy and reliability, making it an ideal choice for high-precision lithography work. The tool is equipped with advanced safety features that provide superior protection against various environmental conditions while working. Additionally, TOKYO ELECTRON Clean Track ACT 8 / ACT 12 is designed for easy maintenance and repair, allowing for maximum up-time and efficient operation. Overall, Clean Track ACT 8 / ACT 12 asset is an advanced and reliable photoresist model suitable for the most demanding lithography requirements. It is designed to provide superior accuracy while minimizing downtime and the risk of contamination. With features such as programmable recipe control and automated baking, TEL / TOKYO ELECTRON Clean Track ACT 8 / ACT 12 is a great choice for any lithography application.