Used TEL / TOKYO ELECTRON Clean Track ACT 8 #162688 for sale

TEL / TOKYO ELECTRON Clean Track ACT 8
ID: 162688
Wafer Size: 8"
(2) Coaters / (2) Developers system 4 UNCs Open cassette CSB Single block (1) IFB Currently installed.
TEL / TOKYO ELECTRON Clean Track ACT 8 is a photoresist equipment offered by TEL. It uses a proprietary proprietary Dry Scrub technology to clean and remove developed photoresist residues with high efficiency and accuracy. The system employs uses a unique combination of high speed rotary brush, vacuum extraction and ultra-sonic vibration to lift organic residues from substrates. The unit is said to be able to fully remove organic residues in one pass with high uniformity, repeatability and accuracy. The machine is composed of two main components: the Clean Track Scrubber and the Clean Track Vacuum Tool. The Clean Track Scrubber is a cylindrical scrubber unit with a brush head at the center. The brush head is powered by a motor to spin counterclockwise, scrubbing the wafer surface and removing organic residue particles. At the same time ultra-sonic vibration is applied to the wafer surface, further enhancing the scrubbing process and ensuring even removal of organic residues. The Clean Track Vacuum Asset is designed to extract the debris particles generated by the scrubber. It is composed of a vacuum chamber, exhaust fan and solenoid valve. As the rotary brush spins, particles are removed from the wafer surface. The vacuum chamber then captures and transports them away from the model through the exhaust fan and solenoid valve. TEL Clean Track ACT 8 offers professional grade cleaning performance that meets the strictest requirements of automotive, medical and semiconductor industries. The equipment has adjustable brush speed and enhanced uniformity, repeatability and accuracy. It also offers low downtime as the process is performed quickly and efficiently. Additionally, the system provides high levels of safety and environmental performance, as it is designed to minimize the need for hazardous chemicals while adhering to stringent environmental regulations.
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