Used TEL / TOKYO ELECTRON Clean Track ACT 8 #293682819 for sale
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ID: 293682819
Wafer Size: 8"
Vintage: 2001
(4) Coater / (3) Developer system, 8"
2001 vintage.
TEL / TOKYO ELECTRON Clean Track ACT 8 is a state-of-the-art photoresist equipment designed for advanced semiconductor manufacturing processes. This system plays a critical role in patterning integrated circuits and microchips by transferring patterns from a photomask onto a silicon wafer through a series of lithography steps. TEL ACT 8 is specifically engineered to ensure high precision, efficiency, and consistency in the photoresist coating and developing processes. One of the key features of TOKYO ELECTRON ACT 8 OR ACT 12 is its advanced track architecture, which includes multiple modules for different process steps such as coating, baking, exposing, and developing. This modular design allows for seamless integration of the various stages of the lithography process and facilitates rapid processing of wafers with minimal downtime. The unit is equipped with robotic handling systems to automate the wafer loading and unloading process, further enhancing its overall efficiency and throughput. The Coater module of TOKYO ELECTRON ACT 8 is responsible for dispensing a thin layer of photoresist material onto the surface of the silicon wafer. This step is crucial for creating a uniform and defect-free photoresist layer that will serve as the foundation for the subsequent patterning steps. The machine utilizes advanced coating techniques such as spin coating or spray coating to achieve highly uniform film thickness across the wafer surface. After the photoresist material is deposited, the wafer is transferred to the Baking module for the post-coat bake process. This step involves heating the wafer to remove any solvent residues and to ensure proper adhesion of the photoresist material to the wafer surface. TEL / TOKYO ELECTRON ACT 8 OR ACT 12 is equipped with precise temperature control systems to achieve optimal baking conditions for different types of photoresist materials. Next, the wafer is moved to the Exposure module where the desired patterns are transferred onto the photoresist layer using a photomask and exposure tool. TOKYO ELECTRON Clean Track ACT 8 supports various types of lithography techniques such as proximity, contact, and projection lithography, depending on the specific requirements of the semiconductor manufacturing process. The asset offers high-resolution imaging capabilities to achieve sub-micron pattern features with exceptional accuracy and repeatability. Following the exposure step, the wafer is transported to the Developer module for the final developing process. In this step, the exposed photoresist material is selectively removed from the wafer surface using a chemical developer solution, revealing the underlying patterned structures. Clean Track ACT 8 is designed to maintain strict control over the development parameters such as temperature, time, and agitation to ensure precise pattern transfer and minimal defects. Overall, ACT 8 OR ACT 12 is a cutting-edge photoresist model that offers unparalleled precision, productivity, and reliability for semiconductor manufacturing applications. Its advanced features and capabilities make it an indispensable tool for producing advanced integrated circuits and microchips with high performance and functionality.
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