Used TEL / TOKYO ELECTRON Clean Track ACT 8 #9235479 for sale

TEL / TOKYO ELECTRON Clean Track ACT 8 is a photoresist equipment that is designed for use in semiconductor photomask patterning and processing applications. This system is a dry film photoresist deposition unit that utilizes a robotic arm for precise deposition of the photoresist layer onto the substrate surface. This machine is available in two configurations, the standard ACT 8 and the ACT 8-XHD. The ACT 8 is integrated with a higher resolution droplet generator which enables the higher resolution of 0.4 microns. Additionally, the tool is equipped with four dispense heads for simultaneous deposition and is capable of depositing at least 200 wafers per hour. This asset is designed with a lightpipe model that is utilized to ensure uniform exposure to each substrate. The lightpipe exposes the photoresist to intense ultraviolet and imaging light to create ultra-high resolution patterns. This equipment also utilizes a recirculation and filter system for efficient dispense of photoresist solution with less waste generation. The ACT 8 is capable of dealing with a variety of substrates including gamma sensitive materials and can be used for a wide range of applications. It can be used to pattern thin film structures, contacts, and line densification. Additionally, the unit is capable of patterning over bondpads, doing overlay processes, and patterning backside of the substrates. Furthermore, this machine utilizes the INFINITY photoresist management software. This software is used to monitor relevant parameters such as solution supply, image alignment and resolution, and dispense head status. It is also used to ensure proper exposure for each substrate and provide alert messages when there are any discrepancies in the tool. Overall, TEL Clean Track ACT 8 is a high-performance photoresist asset that is designed to meet the demands of semiconductor photomask patterning and processing applications. This model is capable of dealing with a variety of substrates and can be used for many applications. Additionally, the equipment is equipped with the INFINITY photoresist management software, which allows for precise and efficient operation of this system.