Used TEL / TOKYO ELECTRON Clean Track ACT Lithius #293641947 for sale

TEL / TOKYO ELECTRON Clean Track ACT Lithius is a photoresist equipment that combines physical and chemical processing to create fine patterns on semiconductor and other microelectronic surfaces. This system is used to create fine features with high accuracy and repeatability on wafers and substrates. The unit consists of five main components: a light source, pattern generator, a coater/developer, an analyzer, and a vacuum chamber. The light source emits high-intensity light with a specific wavelength and pattern that activate the photoresist on the substrate. The pattern generator creates an accurate pattern via a series of beams, which then passes through the light source. The coater/developer then coats the substrate with photoresist, which is then exposed to the patterned light. The photoresist is then chemically developed, resulting in a pattern etched onto the substrate surface. Finally, the analyzer effectively measures the accuracy of the formed pattern. This is done by collecting data from the patterned substrate in the vacuum chamber, allowing the analyzer to detect any discrepancies between the substrate and the desired pattern. The analyzer also allows operator to make adjustments to the pattern generator and/or light source in order to achieve the desired pattern accuracy. In addition, the machine features an in-line infrared microscope and a gas delivery tool that allows for precise control of the develop and etch rates. This is done by controlling the temperature and concentration of the gases to adjust their reactivity. The end result is an incredibly accurate patterned substrate, which is created in a fraction of the time as traditional photolithography. This makes TEL Clean Track ACT Lithius asset a reliable and cost-effective solution for a variety of microelectronics applications.