Used TEL / TOKYO ELECTRON Clean Track Lithius #9203697 for sale

TEL / TOKYO ELECTRON Clean Track Lithius is an advanced photoresist process equipment designed to achieve the highest levels of micro/nano device manufacturing. With its high level of throughput and low defect rates, it's a cost-effective solution for applications ranging from basic through advanced performance. The system uses laser light to create high-resolution patterns on wafers. Its direct, pulse-by-pulse imaging methodology supports multiple lithography options, including ArF (argon fluoride) immersion, KrF (krypton fluoride) dry and hybrid modes. The beam energy can be adjusted to varied application requirements, with a high pulse repetition rate for production and ultra-high accuracy pulsing for precise overlay and fine feature exposure. A wide range of useful post-exposure processes like baking, developing, stripping, curing and ion beam milling are also supported. TEL Clean Track Lithius is built to minimize contamination and maximize process efficiency. The unit's air cleaning machine helps remove pollution and other floating particles from the exposures. A patented-active noise cancellation module lowers the background pressure noise, and the tool is equipped with a detailed micro-mesh filter, triple filtration and a UV light sterilization function. The device uses a partially supervised chemical supply locking asset to limit the risk of chemical stains or particle contamination. The model also features a built-in intelligent blower and is capable of modulating the pressure within the chamber. The user interface of TOKYO ELECTRON Clean Track Lithius is simple and intuitive. The common software environment can be used for multiple platform models and advanced tech support services are available 24 hours a day. Clean Track Lithius is fast, accurate, and reliable. With its compact design, few parts, and low maintenance costs, it's suitable for both small and large-scale production environments. The device has undergone rigorous testing and has achieved a variety of certifications, including ISO 9001:2015, ISO 14001:2015, and EPA conformity. TEL / TOKYO ELECTRON Clean Track Lithius is a powerful and cost-effective photoresist process equipment that can help you meet the complex demands of today's micro/nano device manufacturing.