Used TEL / TOKYO ELECTRON Clean Track Lithius #9206373 for sale

TEL / TOKYO ELECTRON Clean Track Lithius is a photoresist equipment designed to provide ultra-clean results with improved throughput and cost savings. This system employs high-precision lasers to precisely separate the positive or negative areas of a given photoresist pattern from one another quickly and precisely. TEL Clean Track Lithius has an adjustable optical base block that can modify the exposure conditions and laser characteristics individually, allowing for highly precise patterning. The unit also utilizes a modular design to improve setup flexibility and conveniently load and unload large substrates. The machine is capable of producing patterns with a minimum line width and spacing of 1.4 and 2 microns respectively, with a fine focus beam capable of resolving 0.5 micron features. The unit is conveniently controlled by a Graphical User Interface (GUI) software, allowing for easy operator usage and real-time adjustments. Accurate laser shot spacing further improves patterning repeatability and reliability. TOKYO ELECTRON Clean Track Lithius is designed to operate in a stable manner, ensuring the patterning quantity and quality required for production purposes. Clean Track Lithius utilizes specialized dry cleaning equipment, enabling efficient cleaning of the substrate and resists even in high-volume production environments. The tool employs a three-stage filtering structure for better particle control, resulting in improved contamination levels, and reduced cost and downtime associated with cleaning. The implements active contamination detection, which allows for the continuous adjustments of the asset as needed. In addition, TEL / TOKYO ELECTRON Clean Track Lithius integrates real-time scanning electron microscopy and transmits high resolution images for rapid defects analysis and resolution. This integrated detection model eliminates the need to take the sample off the production line, reducing time and cost. The equipment further utilizes a software system to adjust levels and features such as focus and shot positions automatically according to the predetermined values, allowing for an even higher degree of precision. Overall, TEL Clean Track Lithius is an advanced photoresist unit designed to provide ultra-clean results with improved throughput and cost savings. With its precise lasers, automated feature adjustments, high-resolution imaging and active contamination detection, this machine is an ideal solution for production environments that require high quality and repeatability.