Used TEL / TOKYO ELECTRON Clean Track Lithius #9267953 for sale

TEL / TOKYO ELECTRON Clean Track Lithius is a state-of-the-art semiconductor wafer processing equipment designed for the production of photoresists. This system combines an advanced cleaning process with a highly accurate photoresist deposition unit to produce the highest quality products on demand. TEL Clean Track Lithius features a pair of robotic arms to move the wafers between cleaning and deposition stages. The machine's integrated cleaning process uses pure water additives and oxygen to provide totally clean wafers that are free of organic and inorganic contaminants. The deposition tool consists of a pair of ultra-high density, plasma-enhanced vapor deposition guns, which thermally vaporize and condense compounds onto the wafer surface, giving excellent uniformity and reproducibility of the photoresist pattern. The asset is configured with two independent conveyor tracks on the top and bottom sides of the process chamber to manage the wafers, and can process up to 300 200mm wafers per hour. The proprietary TOKYO ELECTRON Clean Track Lithius software suite allows for full control of the model parameters during wafer processing, including the ability to save recipes and modify them on the fly. Through its hardware and software, the equipment is capable of achieving deposit uniformity of +/- 0.9µm across the entire wafer surface. The system is equipped with auto-diagnostic capabilities to detect and correct any process abnormalities in real time. In addition to its excellent process control capabilities, Clean Track Lithius also features a variety of safety features to protect the unit from contamination and operation errors. The machine is fitted with multiple metallic anti-contamination baffles and air curtains to minimize leakage of particles into the process chamber. It also uses a multiplexed inlet-pumping architecture to ensure that the gases used in the process are free from hydrocarbons that may be hazardous to the wafer. Finally, the tool is equipped with tool-specific safety circuit checks to ensure that the asset is properly operated. TEL / TOKYO ELECTRON Clean Track Lithius is an ideal tool for precision high-volume photoresist deposition. It is designed for 24/7 operation and is currently installed in a variety of laboratories and production facilities around the world. The model is highly efficient and designed for years of reliable operation, allowing users to process photoresists quickly, increases wafer yields and profitability.