Used TEL / TOKYO ELECTRON Clean Track Lithius #9404399 for sale
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ID: 9404399
Wafer Size: 12"
Vintage: 2006
Coater / Developer system, 12"
Single block
Does not include Hard Disk Drive (HDD)
Track 1:
(2) COT Cups
(3) Developper cups
Track 2:
Resist reduction: RRC
Dev nozzle: SH Nozzle
Resist pump:
(2) RDS 10 ml
(6) RDS 4 ml
Oven:
COT: (3) CLHP
PEB: (4) CLHP
Post bake:
(4) LHP
(2) TAD
Track chemical:
Resist supply: Gallon bottle
Thinner: OK73
2006 vintage.
TEL / TOKYO ELECTRON Clean Track Lithius is a photoresist equipment used for the production of integrated circuit devices. This system allows for the exacting lithographic patterning of narrow, precise features onto a wafer of semiconductor material. This technology enables the accurate delivery of high-resolution circuit patterns at critical dimensions. The unit is composed of three main components: a stepper/scanner, a photoresist track/module, and a wet bench module. The stepper/scanner provides the exacting light source pointed accurately to the wafers to be patterned and ensures the correct positioning of the light source. The photoresist track/module controls the application of the photoresist liquid used to create the circuit pattern on the wafer. This material is applied in a specified thickness and must conform to strict parameters to ensure accuracy of the feature patterns. Finally, the wet bench module handles the chemical processing of the wafer through curing of the photoresist, etching and other processes—all performed with absolute precision to achieve the desired results. In order to achieve the most precise patterns on the wafer, the machine must be properly calibrated. The stepper/scanner must be kept advanced and properly aligned, with all components fault-checked to ensure optimum performance. The photoresist track/module must be kept clean, free from any contaminants that would negatively affect the uniformity of the photoresist application. Finally, the wet bench module must be kept in optimal condition, making sure that all tanks and pipes are free from any build-up and that all chemicals are stored and monitored properly. In summary, TEL Clean Track Lithius is a 3-in-one tool that is capable of accurately delivering high-resolution circuit patterns with the highest possible precision. This asset requires a high degree of maintenance and proper calibration in order to ensure the accuracy of the patterns produced.
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