Used TEL / TOKYO ELECTRON Clean Track Mark 5 #9198152 for sale

TEL / TOKYO ELECTRON Clean Track Mark 5 is a photoresist equipment engineered for advanced lithography and manufacturing processes in the semiconductor industry. It utilizes a unique patterning technique known as HxP (High-X Movement Patterning) to ensure uniform, high-resolution results. TEL Clean Track Mark 5 utilizes an optimized soft-touch stepper system, providing highly accurate masks with high density, short line widths, and high-transparency fields. The stepper unit consists of a number of components, including an acousto-optic modulator (AOM), an Objectives Lens Machine (OLS), a stepper stage, and a polarization stage. The AOM is designed for fast and efficient mask fabriaction, while the OLS offers increased imaging accuracy and performance. The stepper stage ensures steady and accurate movements during process execution, while the polarization stage increases overall performance by optimizing the stepper tool calibration. The asset's HxP process incorporates a three-step method of photoresist patterning. First, an initial circuit layout is imprinted onto the wafer. Next, the wafer is beveled in order to create a uniform field-to-field gap, which helps minimize exposure time during the next step. Finally, photomask exposure is carried out, utilizing a laser scanning technique for quality assurance and accuracy. TOKYO ELECTRON Clean Track Mark 5 is designed for throughput and precision, optimizing the process accuracy to provide uniform and accurate results on both high-aspect ratio and vertical structures. The model is automated and has built-in imaging adjustments, such as recipe-based imaging mode optimizations. Additionally, the equipment features a library-based database, allowing users to store known recipes for quick and easy retrieval. In addition to its advanced features and precise patterning, Clean Track Mark 5 is also designed with safety as a top priority. It utilizes a unique dust collection system for maximum safety, preventing the accumulation of hazardous particles in the cleanroom workspace. Overall, TEL / TOKYO ELECTRON Clean Track Mark 5 is an advanced photoresist unit, engineered to provide users with precision and accuracy, as well as enhanced safety. Its unique HxP process ensures uniform and optimal results, while its automated features and library-based database make the machine both user-friendly and efficient.