Used TEL / TOKYO ELECTRON Clean Track Mark 5Vz #9302022 for sale

TEL / TOKYO ELECTRON Clean Track Mark 5Vz
ID: 9302022
Coater / Developer system.
TEL / TOKYO ELECTRON Clean Track Mark 5Vz is a state-of-the-art photoresist equipment for patterning integrated circuits on semiconductor substrates. It is fully compatible with 5V, 0.25-micron designs and is designed for the highest levels of yield and performance. Its advanced features include an optimized triple-purge alignment system, a dual-mode grid aligner, and an integrated anti-collision unit. The triple-purge alignment machine enables precise registration of the alignment marks within a few microns. This ensures accuracy and minimizes the loss of patterning accuracy caused by the shift of the target substrate. In addition to the fine alignment accuracy, the dual-mode grid aligner provides enhanced precision of alignment from three dimensions. This feature ensures that the positions of entire patterns are accurately processed according to the predetermined design drawing. The tool also features an integrated anti-collision asset. It prevents any contact between the scanning stage and the semiconductor substrate by using a number of optical sensors. Furthermore, it halts operations if possible contact between the two systems is detected, allowing for an effective prevention of damage to the substrate. The Mark 5Vz is the most advanced photoresist model on the market, offering the highest speed and accuracy. Its optimized design eliminates errors, reduces complexity, and increases the yield rate. Its anti-collision equipment helps to ensure that patterns are correctly generated, preventing costly damages to the substrate. This makes it an ideal choice for modern high-precision integrated circuit production.
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