Used TEL / TOKYO ELECTRON Clean Track Mark 7 / Mark 8 #293656061 for sale
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TEL Clean Track Mark 7 and Mark 8 systems are advanced photoresist systems used in the processing and manufacturing of semiconductor integrated circuits. The systems provide photoresist processing, covering both the microlithography and the post-exposure etching processes. At the microlithography level, light is used in the production of a semiconductor device. This light is directed at the photoresist layer to create a mask pattern. The equipment uses advanced optical components and software to accurately provide the necessary resolution and light intensity for high-performance lithography. At the post-exposure etching level, the photoresist layer that was exposed to the light is treated with an etchant that forms a pattern. The photoresist is then removed easily using advanced equipment such as DC oxygen plasma and O2 reactive etchers. The Clean Track Mark 7 and Mark 8 systems are designed to deliver high precision and low defectivity. The Clean Track Mark 8 system, the latest unit from TOKYO ELECTRON, features a higher resolution than the Mark 7. it also uses innovative technologies such as an airborne micro particle deaerator for super clean operation. This helps prevent damage and degradation of components in the machine, resulting in better throughput and product quality. The Clean Track Mark 7 and Mark 8 systems feature advanced control and automation tools for photoresist processing. software components such as ProSysWafer enable users to remotely monitor the entire production process from any location. Additionally, the tool provides statistical process control(SPC) options that offer valuable insights into the photoresist processing process. Furthermore, the asset is designed to withstand change in environment during the production process, which makes it suitable for use in various types of production environment such as cleanroom, standard environment, and vacuum. The model also features convenient maintenance features such as self-diagnostics, and preventative maintenance alarms. In conclusion, TEL / TOKYO ELECTRON Clean Track Mark 7 and Mark 8 systems provide advanced photoresist processing options for use in semiconductor manufacturing. The systems feature advanced optical components, software, and and etching technologies that enable them to deliver superior resolution and precision with low defectivity. Additionally, the equipment features automation and control tools and is highly reliable even when used in demanding production environments.
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