Used TEL / TOKYO ELECTRON Clean Track Mark 8 #9158018 for sale
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TEL / TOKYO ELECTRON Clean Track Mark 8 (CTM-8) is a photoresist equipment designed to provide high-resolution, high-speed patterning of semiconductor materials. It offers a wide range of features and capabilities that make it suitable for a variety of use cases. The CTM-8 is composed of two main parts: the coat station and the develop station. The coat station consists of a substrate loading system, a heated vacuum chamber, a resist coating head, and a conveyor unit for transferring substrates from the loading machine to the develop station. The develop station includes a heated vacuum chamber, an etch source, and an individual substrate transport tool that moves the substrates between the two. The CTM-8 is equipped with a high-resolution optical imaging asset, which is capable of producing image resolutions as low as 0.2μm. This enables precise, high-precision patterning of delicate materials. The model also provides accurate substrate alignment, which allows for rapid, accurate patterning. Additionally, the CTM-8 is equipped with an automated cleaning process that efficiently removes any residue on the etched substrate. The CTM-8 is designed to optimize the photoresist coating process. It incorporates a proprietary Resist Control function, which allows the user to precisely monitor and control the thickness of the applied resist. This ensures repeatable, reliable results during each process run. Additionally, the equipment features Smart Profile Control, which assists in maintaining uniform resist line profiles. The CTM-8 has also been designed to provide improved performance in operation and maintenance. It includes a built-in gas recovery system which helps reduce gas consumption, thereby increasing operability. Additionally, the unit includes a quick-change nozzle machine that simplifies nozzle maintenance, reducing downtime. In addition, the tool includes a menu-driven operator interface for fast and easy operation, as well as a remote access feature for remote troubleshooting. Overall, TEL Clean Track Mark 8 provides users with a reliable, robust, and high-performance photoresist processing solution. With its high-resolution optical imaging asset and its precise control of the resist coating process, the CTM-8 is an ideal choice for semiconductor patterning. In addition, its automated maintenance processes and user-friendly interface make it a great choice for any application.
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