Used TEL / TOKYO ELECTRON Clean Track Mark 8 #9269249 for sale

ID: 9269249
Vintage: 1995
(2) Coater / (2) Developer system 1995 vintage.
TEL / TOKYO ELECTRON Clean Track Mark 8 is a one of a kind photoresist equipment designed to accommodate the needs of the modern semiconductor manufacturer. This system is designed to deposit and strip photoresist from wafers to create intricate patterns with the utmost precision and accuracy. TEL Clean Track Mark 8 uses an electron beam to expose and insolubilize photoresist, as well as a chemical ashing process to complete the etching process. This unit can precisely etch line widths down to 0.35µm, as well as line edges that are chamfers and rounded corners. The machine features automated, programmable resist dispense and removals to ensure accuratel deposition and stripping of photoresist. In order to ensure uniformly thin layers of resist, the Clean Track Marks 8 is equipped with an automatic tilt interval tool. This asset allows dispense and strip repeatability and uniformity on wafers as large as 8 inches in diameter. As a unique provided feature of TOKYO ELECTRON Clean Track Mark 8, the presence of a gas shower helps to keep residue, particles, and other contaminants off of the wafer surface. This model also features a particle density control equipment, which is designed to keep minimal levels of particles on the substrate surface. On the interior of the system, the resist dispense mechanism is built from stainless steel. This helps to avoid the accumulation of resist and keeps magnetic particles from interfering with the exposure process. Overall, Clean Track Mark 8 has been designed with the highest attention to detail and reliability. The combination of superior vacuum arm and wafer clamping design, coupled with the automatic tilt interval unit, creates a photoresist machine that offers the most advanced, reliable, and highest precision results for modern semiconductor manufacturing needs.
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