Used TEL / TOKYO ELECTRON Clean Track Mark 8 #9395945 for sale
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ID: 9395945
Vintage: 1995
Coater / Developer system
COT
ARCCOT
(2) DEV
WEE
Missing parts:
AD ASSY Unit
UL200T-L1
Circulator
Main arm
C/S Unit bottom fan
(6) Fuses, 2 A
T&H CPB-2-M2, Cup temperature cooker body
WEE Driver ASSY
Surge Tank Controller
Inheritor PC
Spin motors
Spin drivers
I/D X-axis driver
I/D Y-axis driver
I/D Z-axis driver
1995 vintage.
TEL / TOKYO ELECTRON Clean Track Mark 8 is a highly precise, automated photoresist equipment designed to create high-quality patterns in the semiconductor and FPD production process. Photoresist is a light-sensitive polymer material used to create patterns on a substrate. TEL Clean Track Mark 8 focuses on achieving extremely precise and repeatable patterning of photoresist. It delivers rapid, reliable exposure capabilities to ensure consistent accuracy and high-quality patterns. The system features a rugged control unit with powerful signal processing and control to guarantee precise positioning. It is also equipped with highly precise beam scanning, which enables it to create nanoscale patterns with a repeatability of less than one nanometer. The integrated motion control machine of TOKYO ELECTRON Clean Track Mark 8 includes high-resolution linear encoders, stepper motor controllers, and voice coil motor controllers. This enables precise motion control for a variety of applications. The image resolution is up to 13um (0.0005") to meet the requirements of a wide range of applications. Clean Track Mark 8 also incorporates an advanced field-emission electron beam that minimizes lens aberrations and provides a highly coherent, uniform electron beam. This high-resolution electron beam allows for low energy electron exposure and shortwriting times. The tool also features improved contamination control and minimizes the effects of environmental changes on the performance of the equipment. The asset is designed for easy integration into a production line. The user-friendly Touch Panel LCD can be operated with a wireless remote control and gesture-based commands. The model also includes built-in productivity monitoring software, so manufacturers can easily track process progress and have total control of in-process conditions. TEL / TOKYO ELECTRON Clean Track Mark 8 delivers greater precision, higher efficiency and improved productivity. This photoresist equipment is designed to meet the needs of semiconductor and FPD production lines, ensuring high-quality, high-performance results.
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