Used TEL / TOKYO ELECTRON Clean Track Mark Vz #293628523 for sale

TEL / TOKYO ELECTRON Clean Track Mark Vz Photoresist Equipment is a photoresist process solution designed for precision microfabrication and high-volume production in the semiconductor industry. Combining state-of-the-art photoresist dispense with G3 process control, this system enables greater process uniformity with higher repeatability at lower maintenance cost and waste. The core of the unit is the application module, which contains the two pre-aligned dispense chambers. This configuration ensures minimization of dispense variability and supports exceptionally uniform and high-resolution results. The chambers allow for quick switching between solvents, allowing for a wide range of process flexibility. Automatic calibration and synchronization of temperature, flow, and dispense voltage compensation help maintain repeatable performance from batch-to-batch. The machine also includes an advanced control unit, the Mark Vz Controller. This intelligent tool provides the user with a range of features such as automated process control, statistical process control, photo-alignment control, and automatic compensation of lower dispense rates. The on-board software further improves the performance through its advanced feature recognition functions, minimizing the effect of dispense variations and ensuring minimal downtime. For enhanced repeatability, the asset is designed with a closed-loop cooling model, with four thermally independent temperature sensors. This ensures temperature accuracy to within 0.3° C, providing the highest levels of repeatability in the industry. The equipment also offers an automatic mask change solution, allowing for improved process management and efficient operator set-up. For even greater performance and accuracy, the system also offers additional physical and electrical process functions, allowing for greater control of safety, precision, and throughput. Overall, TEL Clean Track Mark Vz Photoresist Unit is a high-performance, low-maintenance photoresisting solution tailored for the demands of the semiconductor industry. By combining uniform dispensing, advanced process control and control, and enhanced repeatability and accuracy, this solution provides unmatched levels of performance, quality and cost-efficiency.