Used TEL / TOKYO ELECTRON Clean Track #9281924 for sale
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TEL / TOKYO ELECTRON Clean Track is a photoresist equipment that enables accurate patterning and high throughput in semiconductor manufacturing. The system is comprised of a series of components designed to ensure precise features while optimizing processing times. The unit's core technology is an advanced photoresist composition that requires less exposure time than traditional processes, allowing more features to be etched onto a single wafer. To ensure maximum control of the photoresist, the machine includes an advanced imaging module, which allows for greater accuracy and resolution in patterning. In addition, the tool utilizes lasers to ensure accurate etching as well as precise alignment of the photoresist on the wafer. For deposition, the asset uses advanced deposition strategies that help to create consistent features and uniform deposition on the wafers. This allows for improved manufacturability and a higher yield of the finished product. To provide further control, the model includes a heating element that heats the wafer to a specific temperature for precise material handling. Heat is also used for quick thermal cycle connections, helping improve process times as well as yield. To protect the wear or tear of tools over time, the equipment also includes automatic cleaning of the photoresist system. This is accomplished through its integrated cleaning cycle, which removes any contaminants or residue from the wafer. Additionally, it also makes use of a special ultra-sonic cleaning process that minimizes stiction and contamination, improving the surface uniformity and allowing for more accurate processes. Finally, the unit also features an advanced material control machine that uses advanced algorithms to model the best placement of features to optimize process times while still maintaining the integrity of the feature. The tool also provides traceability, allowing for further improvements to be made to the processes by analyzing data from multiple production runs. In summary, TEL Clean Track is a comprehensive photoresist asset designed to improve processing times and yields. With advanced imaging, deposition and cleaning strategies, as well as material control, the model helps ensure precise features while maintaining the quality of the end product. By using lasers, automated cleaning and sophisticated algorithms, the equipment provides a reliable and efficient method for producing high-quality semiconductor devices.
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