Used TEL / TOKYO ELECTRON Clean Track #9399665 for sale
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ID: 9399665
Wafer Size: 6"
Vintage: 1995
Wafer edge exclusion track system, 6"
1995 vintage.
TEL / TOKYO ELECTRON Clean Track is an advanced photoresist equipment used by semiconductor manufacturers in the production of integrated circuits. Photoresist is a light-sensitive chemical film used to form circuits on various substrates. It is subjected to various steps of lithography, etching, and deposition processes. TEL Clean Track system helps to minimize the risks and improve the accuracy of these processes. TOKYO ELECTRON Clean Track unit is designed to provide a stable and consistent environment around the wafer exposed to the sensitive photoresist step of the processes. It features multiple stages that focus on preventing particle contamination, which can lead to defects in the final product. These stages include: particle pre-agents, static control, clean gas, particulate filtration, environmental monitoring and post cleaning. Particle pre-agents are used to identify and remove contaminants within Clean Track chamber. The static control prevents potential static charges that can build up within the chamber, which can also cause particle contamination. The clean gas is a highly filtered mixture which prevents the introduction of anynew particles inside the chamber. The particulate filtration is an active filtration machine which captures particles from the ambient environment in addition to the previously eliminated particles. Environmental monitoring systems detect any particles before entering TEL / TOKYO ELECTRON Clean Track chamber. Finally, the post cleaning is done for further particle elminination. TEL Clean Track tool helps semiconductor manufacturers produce high quality integrated circuits in a highly efficient process with minimal defects. This is achieved by eliminating particle contamination from the entire lithography process, thus allowing for tight process control to be maintained during each step. In addition, the asset is capable of ensuring that the product of each step is free from defects. Overall, TOKYO ELECTRON Clean Track model acts as the foundation for high yield, cost effective semiconductor manufacturing.
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