Used TEL / TOKYO ELECTRON CS-600 #9380679 for sale

ID: 9380679
Vintage: 2002
Plasma cleaner 2002 vintage.
TEL / TOKYO ELECTRON CS-600 is a photoresist equipment used for the precise application of a photoresist material onto a wafer or substrate. The photoresist material is sensitive to light and can be used to create patterns on the substrate for various applications. The photoresist system is consists of an nozzle unit and a scanner head. The nozzle machine, also known as the spin coat unit, contains a programmable motor for controlling the spin rate, nozzle temperature and resistivity for precise application of the photoresist material on the substrate. The scanner head is an optical sensor for accurately positioning the wafer in the coating device. It uses telecentric lenses, which reduce imaging-related distortion and provides flawless imaging. In addition, TEL CS-600 photoresist tool is equipped with an advanced control unit, for asset control and handling. It enables users to set the desired speed, temperature, resistivity and pressure according to the needs of the process. The unit further offers a spectrum analysis function, which is used to analyze the photoresist material for proper material deposition. TOKYO ELECTRON CS-600 is also equipped with an Advanced Programmable Logical Controller (APLC), which is used to execute the tasks. This sophisticated device can perform a variety of complex tasks for multiple process steps, while still maintaining high accuracy. In summary, CS-600 photoresist model is an efficient and reliable solutions for photolithography. It is equipped with the latest in technological advancements to perform precise, repeatable and reliable photoresist deposition on substrates. Its tight control on parameters such as spin rate, temperature and resistivity ensure that substrates are coated with the exact amount of photoresist material and uniformity.
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