Used TEL / TOKYO ELECTRON CS-600 #9380684 for sale

ID: 9380684
Vintage: 1999
Plasma cleaner 1999 vintage.
TEL / TOKYO ELECTRON CS-600 (TEL CS-600) is a photoresist equipment designed by TEL (TOKYO ELECTRON) for producing accurate and high quality resists on a wafer surface. TOKYO ELECTRON CS-600 is a fully automated system which includes exposure, cooling, and resist stripping functions. The exposure process is managed by an advanced vision unit with a variable light source spanning the full spectrum of ultraviolet (UV) to visible to infrared (IR) light. The machine also includes a variable-speed cooling sink which allows for better heat management and enables the formation of small and complex conductive lines. The resist stripping process is performed on the spin cleaner module, which provides for high-accuracy production of resists in a wide variety of wafer sizes and shapes. Using advanced imaging tools, and equipped with features such as auto-alignment and stage auto-alignment, CS-600 is able to align a wafer onto a positioning stage with micrometer precision. The imaging tool is also equipped with an auto-focus function, which ensures a stable image at all times and enables the asset to produce high-precision resists without the need for manual intervention. In addition, TEL / TOKYO ELECTRON CS-600 is capable of producing resists with thicknesses down to 1000 angstroms (1nm). TEL CS-600 is an environmentally-friendly model and compliant with EPA regulations to ensure safety during exposure. The equipment is also equipped with a variety of safety features, such as automatic shutoff systems, to reduce the potential for accidents. TOKYO ELECTRON CS-600 is an advanced photoresist system with a broad range of features that enable it to produce accurate and high-quality resists. The unit is user-friendly, complies with safety standards, and is capable of producing resists with a wide range of thicknesses and complexity. This allows CS-600 to be used in a variety of industrial applications, such as semiconductor production and medical device manufacturing.
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