Used TEL / TOKYO ELECTRON CS-600 #9380688 for sale

TEL / TOKYO ELECTRON CS-600 is a photoresist equipment designed to coat and develop advanced substrates in semiconductor mass production. This system utilizes the latest technologies to produce high-quality, high-efficiency results that meet industry standards. TEL CS-600 is designed for optimal substrate utilization, accommodating up to 8x25 inch substrates with a rapid wafer-handling unit. It features automated cassette to cassette functionality through the use of robots, as well as a built-in tracking machine that monitors wafer throughput, tracking wafer transport and wafer coating and development stages. The tool enables rapid coating of photoresists and simplifies recipe workflow, making it suitable for a wide range detergent solutions. Furthermore, the asset is compatible with many spin- and spray-processed chemicals. The high-precision TOKYO ELECTRON CS-600 features a self-diagnostics model which conducts continuous monitoring of the equipment performance and can immediately take corrective action when necessary. The system also provides comprehensive unit metrology, reporting multiple parameters such as temperate, air speed, humidity, force, concentration, displacement and acceleration. The machine incorporates advanced active tools for process control. It can detect and adjust gas pressure, temperature, concentration and solvent flow rate to maintain the highest levels of accuracy. The tool's advanced evaluation tools help to ensure product quality, combining automated inspection with operators' visual inspections. CS-600 can be fully integrated into the operator's production line, offering simultaneous control of numerous modules, such as wafer transfer, chemical mix, and substrate transfer. TEL / TOKYO ELECTRON CS-600 photoresist asset is designed to meet high performance and productivity requirements. By providing the fastest speeds and highest throughputs in its class, TEL CS-600 can maximize production efficiency. This model is an ideal choice for semiconductor suppliers aiming for more efficient and reliable process operations.