Used TEL / TOKYO ELECTRON CS-600 #9399466 for sale

TEL / TOKYO ELECTRON CS-600 Photoresist Equipment is a high-end photolithography processing system designed to optimize productivity and accuracy for your 5-micron device manufacturing. Featuring the latest in advanced imaging technology, TEL CS-600 Photoresist Unit enables accurate processing of the smallest features with aresolution less than 5 μm. The machine also features a high repetition rate of multiple exposure, enabling high-volume production of circuit patterns and features. TOKYO ELECTRON CS-600 Photoresist Tool features a high-speed Imager/Scanner and Autofocuser, enabling high throughput with quick transition between exposures. The integrated optical aligner and alignment monitor offer exquisite accuracy and precision, while the asset's reduction scan capabilities allow for production of the finest lines down to a 5-micron width. The model also comes with a Programmable Chuck for fast wafer exchange. CS-600 Photoresist Equipment can process multiple photoresist and absorbers. Appropriate materials can be used for various device production requirements, based on the process recipes used for a variety of coil diameter and device sizes. The system offers compatible programs to create a versatile photolithography production cell for your specific needs. The unit's integrated vacuum/pressure/coolant module provides true process flexibility and stability, while the full cassette-to-cassette loading and unloading machine offers improved productivity with low cost of ownership. The machine is fully automated and supported with high-performance measurement and metrology packages, offering unparalleled process control. In addition, the machine can be easily integrated with other TEL equipment and offers scalable solutions to meet the specific needs of your device production requirements. TEL / TOKYO ELECTRON CS-600 Photoresist Tool helps to ensure uniform high productivity and accuracy in your 5-micron device manufacturing. With its advanced imaging technology and integrated vacuum/pressure/coolant module, the asset is well-equipped to provide an efficient and cost-effective photolithography production cell.